5/22/2010	9:02:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	9:02:17 AM	Recipe started at 9:02 AM
5/22/2010	9:02:17 AM	H2 valve closed
5/22/2010	9:02:17 AM	BCl3 valve closed
5/22/2010	9:02:17 AM	PH3 valve closed
5/22/2010	9:02:17 AM	SiCl4 pre valve closed
5/22/2010	9:02:17 AM	SiCl4 post valve closed
5/22/2010	9:02:17 AM	Main Vac valve closed
5/22/2010	9:02:17 AM	Bypass valve closed
5/22/2010	9:02:17 AM	Bubbler valve closed
5/22/2010	9:02:17 AM	Helium valve opened
5/22/2010	9:02:17 AM	Helium MFC set to  500.000000
5/22/2010	9:02:17 AM	H2 MFC set to  0.000000
5/22/2010	9:02:17 AM	BCl3 MFC set to  0.000000
5/22/2010	9:02:17 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:02:17 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:02:17 AM	Tube furnace set to 0
5/22/2010	9:03:38 AM	Helium valve closed
5/22/2010	9:03:38 AM	H2 valve closed
5/22/2010	9:03:38 AM	BCl3 valve closed
5/22/2010	9:03:38 AM	PH3 valve closed
5/22/2010	9:03:38 AM	SiCl4 pre valve closed
5/22/2010	9:03:38 AM	SiCl4 post valve closed
5/22/2010	9:03:38 AM	Main Vac valve closed
5/22/2010	9:03:38 AM	Bypass valve closed
5/22/2010	9:03:38 AM	Bubbler valve closed
5/22/2010	9:03:38 AM	Helium MFC set to  0.000000
5/22/2010	9:03:38 AM	H2 MFC set to  0.000000
5/22/2010	9:03:38 AM	BCl3 MFC set to  0.000000
5/22/2010	9:03:38 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:03:38 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:03:38 AM	Tube furnace set to 0
5/22/2010	9:03:39 AM	Run finished at 9:03 AM
5/22/2010	9:03:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	9:07:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	9:07:06 AM	Recipe started at 9:07 AM
5/22/2010	9:07:06 AM	Helium valve closed
5/22/2010	9:07:06 AM	H2 valve closed
5/22/2010	9:07:06 AM	BCl3 valve closed
5/22/2010	9:07:06 AM	PH3 valve closed
5/22/2010	9:07:06 AM	SiCl4 pre valve closed
5/22/2010	9:07:06 AM	SiCl4 post valve closed
5/22/2010	9:07:06 AM	Main Vac valve closed
5/22/2010	9:07:06 AM	Bubbler valve closed
5/22/2010	9:07:06 AM	Bypass valve opened
5/22/2010	9:07:06 AM	Helium MFC set to  0.000000
5/22/2010	9:07:06 AM	H2 MFC set to  0.000000
5/22/2010	9:07:06 AM	BCl3 MFC set to  0.000000
5/22/2010	9:07:06 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:07:06 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:07:06 AM	Tube furnace set to 0
5/22/2010	9:07:52 AM	Helium valve closed
5/22/2010	9:07:52 AM	H2 valve closed
5/22/2010	9:07:52 AM	BCl3 valve closed
5/22/2010	9:07:52 AM	PH3 valve closed
5/22/2010	9:07:52 AM	SiCl4 pre valve closed
5/22/2010	9:07:52 AM	SiCl4 post valve closed
5/22/2010	9:07:52 AM	Bubbler valve closed
5/22/2010	9:07:52 AM	Main Vac valve opened
5/22/2010	9:07:52 AM	Bypass valve opened
5/22/2010	9:07:52 AM	Helium MFC set to  0.000000
5/22/2010	9:07:52 AM	H2 MFC set to  0.000000
5/22/2010	9:07:52 AM	BCl3 MFC set to  0.000000
5/22/2010	9:07:52 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:07:52 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:07:53 AM	Tube furnace set to 0
5/22/2010	9:07:53 AM	Run finished at 9:07 AM
5/22/2010	9:07:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	9:08:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	9:08:20 AM	Recipe started at 9:08 AM
5/22/2010	9:08:20 AM	H2 valve closed
5/22/2010	9:08:20 AM	BCl3 valve closed
5/22/2010	9:08:20 AM	PH3 valve closed
5/22/2010	9:08:20 AM	SiCl4 pre valve closed
5/22/2010	9:08:20 AM	SiCl4 post valve closed
5/22/2010	9:08:20 AM	Main Vac valve closed
5/22/2010	9:08:20 AM	Bypass valve closed
5/22/2010	9:08:20 AM	Bubbler valve closed
5/22/2010	9:08:20 AM	Helium valve opened
5/22/2010	9:08:20 AM	Helium MFC set to  500.000000
5/22/2010	9:08:20 AM	H2 MFC set to  0.000000
5/22/2010	9:08:20 AM	BCl3 MFC set to  0.000000
5/22/2010	9:08:20 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:08:20 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:08:20 AM	Tube furnace set to 0
5/22/2010	9:09:43 AM	Helium valve closed
5/22/2010	9:09:43 AM	H2 valve closed
5/22/2010	9:09:43 AM	BCl3 valve closed
5/22/2010	9:09:43 AM	PH3 valve closed
5/22/2010	9:09:43 AM	SiCl4 pre valve closed
5/22/2010	9:09:43 AM	SiCl4 post valve closed
5/22/2010	9:09:43 AM	Main Vac valve closed
5/22/2010	9:09:43 AM	Bypass valve closed
5/22/2010	9:09:43 AM	Bubbler valve closed
5/22/2010	9:09:43 AM	Helium MFC set to  0.000000
5/22/2010	9:09:43 AM	H2 MFC set to  0.000000
5/22/2010	9:09:43 AM	BCl3 MFC set to  0.000000
5/22/2010	9:09:43 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:09:43 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:09:44 AM	Tube furnace set to 0
5/22/2010	9:09:59 AM	Helium valve closed
5/22/2010	9:09:59 AM	H2 valve closed
5/22/2010	9:09:59 AM	BCl3 valve closed
5/22/2010	9:09:59 AM	PH3 valve closed
5/22/2010	9:09:59 AM	SiCl4 pre valve closed
5/22/2010	9:09:59 AM	SiCl4 post valve closed
5/22/2010	9:09:59 AM	Main Vac valve closed
5/22/2010	9:09:59 AM	Bubbler valve closed
5/22/2010	9:09:59 AM	Bypass valve opened
5/22/2010	9:09:59 AM	Helium MFC set to  0.000000
5/22/2010	9:09:59 AM	H2 MFC set to  0.000000
5/22/2010	9:09:59 AM	BCl3 MFC set to  0.000000
5/22/2010	9:09:59 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:09:59 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:09:59 AM	Tube furnace set to 0
5/22/2010	9:10:32 AM	Helium valve closed
5/22/2010	9:10:32 AM	H2 valve closed
5/22/2010	9:10:32 AM	BCl3 valve closed
5/22/2010	9:10:32 AM	PH3 valve closed
5/22/2010	9:10:32 AM	SiCl4 pre valve closed
5/22/2010	9:10:32 AM	SiCl4 post valve closed
5/22/2010	9:10:32 AM	Bubbler valve closed
5/22/2010	9:10:32 AM	Main Vac valve opened
5/22/2010	9:10:32 AM	Bypass valve opened
5/22/2010	9:10:32 AM	Helium MFC set to  0.000000
5/22/2010	9:10:32 AM	H2 MFC set to  0.000000
5/22/2010	9:10:32 AM	BCl3 MFC set to  0.000000
5/22/2010	9:10:32 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:10:32 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:10:32 AM	Tube furnace set to 0
5/22/2010	9:15:32 AM	H2 valve closed
5/22/2010	9:15:32 AM	BCl3 valve closed
5/22/2010	9:15:32 AM	PH3 valve closed
5/22/2010	9:15:32 AM	SiCl4 pre valve closed
5/22/2010	9:15:32 AM	SiCl4 post valve closed
5/22/2010	9:15:32 AM	Main Vac valve closed
5/22/2010	9:15:32 AM	Bypass valve closed
5/22/2010	9:15:32 AM	Bubbler valve closed
5/22/2010	9:15:32 AM	Helium valve opened
5/22/2010	9:15:32 AM	Helium MFC set to  500.000000
5/22/2010	9:15:32 AM	H2 MFC set to  0.000000
5/22/2010	9:15:32 AM	BCl3 MFC set to  0.000000
5/22/2010	9:15:32 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:15:32 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:15:32 AM	Tube furnace set to 0
5/22/2010	9:16:55 AM	Helium valve closed
5/22/2010	9:16:55 AM	H2 valve closed
5/22/2010	9:16:55 AM	BCl3 valve closed
5/22/2010	9:16:55 AM	PH3 valve closed
5/22/2010	9:16:55 AM	SiCl4 pre valve closed
5/22/2010	9:16:55 AM	SiCl4 post valve closed
5/22/2010	9:16:55 AM	Main Vac valve closed
5/22/2010	9:16:55 AM	Bypass valve closed
5/22/2010	9:16:55 AM	Bubbler valve closed
5/22/2010	9:16:55 AM	Helium MFC set to  0.000000
5/22/2010	9:16:55 AM	H2 MFC set to  0.000000
5/22/2010	9:16:55 AM	BCl3 MFC set to  0.000000
5/22/2010	9:16:55 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:16:55 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:16:56 AM	Tube furnace set to 0
5/22/2010	9:17:11 AM	Helium valve closed
5/22/2010	9:17:11 AM	H2 valve closed
5/22/2010	9:17:11 AM	BCl3 valve closed
5/22/2010	9:17:11 AM	PH3 valve closed
5/22/2010	9:17:11 AM	SiCl4 pre valve closed
5/22/2010	9:17:11 AM	SiCl4 post valve closed
5/22/2010	9:17:11 AM	Main Vac valve closed
5/22/2010	9:17:11 AM	Bubbler valve closed
5/22/2010	9:17:11 AM	Bypass valve opened
5/22/2010	9:17:11 AM	Helium MFC set to  0.000000
5/22/2010	9:17:11 AM	H2 MFC set to  0.000000
5/22/2010	9:17:11 AM	BCl3 MFC set to  0.000000
5/22/2010	9:17:11 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:17:11 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:17:11 AM	Tube furnace set to 0
5/22/2010	9:17:44 AM	Helium valve closed
5/22/2010	9:17:44 AM	H2 valve closed
5/22/2010	9:17:44 AM	BCl3 valve closed
5/22/2010	9:17:44 AM	PH3 valve closed
5/22/2010	9:17:44 AM	SiCl4 pre valve closed
5/22/2010	9:17:44 AM	SiCl4 post valve closed
5/22/2010	9:17:44 AM	Bubbler valve closed
5/22/2010	9:17:44 AM	Main Vac valve opened
5/22/2010	9:17:44 AM	Bypass valve opened
5/22/2010	9:17:44 AM	Helium MFC set to  0.000000
5/22/2010	9:17:44 AM	H2 MFC set to  0.000000
5/22/2010	9:17:44 AM	BCl3 MFC set to  0.000000
5/22/2010	9:17:44 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:17:44 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:17:44 AM	Tube furnace set to 0
5/22/2010	9:22:44 AM	H2 valve closed
5/22/2010	9:22:44 AM	BCl3 valve closed
5/22/2010	9:22:44 AM	PH3 valve closed
5/22/2010	9:22:44 AM	SiCl4 pre valve closed
5/22/2010	9:22:44 AM	SiCl4 post valve closed
5/22/2010	9:22:44 AM	Main Vac valve closed
5/22/2010	9:22:44 AM	Bypass valve closed
5/22/2010	9:22:44 AM	Bubbler valve closed
5/22/2010	9:22:44 AM	Helium valve opened
5/22/2010	9:22:44 AM	Helium MFC set to  500.000000
5/22/2010	9:22:44 AM	H2 MFC set to  0.000000
5/22/2010	9:22:44 AM	BCl3 MFC set to  0.000000
5/22/2010	9:22:44 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:22:44 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:22:44 AM	Tube furnace set to 0
5/22/2010	9:24:07 AM	Helium valve closed
5/22/2010	9:24:07 AM	H2 valve closed
5/22/2010	9:24:07 AM	BCl3 valve closed
5/22/2010	9:24:07 AM	PH3 valve closed
5/22/2010	9:24:07 AM	SiCl4 pre valve closed
5/22/2010	9:24:07 AM	SiCl4 post valve closed
5/22/2010	9:24:07 AM	Main Vac valve closed
5/22/2010	9:24:07 AM	Bypass valve closed
5/22/2010	9:24:07 AM	Bubbler valve closed
5/22/2010	9:24:07 AM	Helium MFC set to  0.000000
5/22/2010	9:24:07 AM	H2 MFC set to  0.000000
5/22/2010	9:24:07 AM	BCl3 MFC set to  0.000000
5/22/2010	9:24:07 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:24:07 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:24:08 AM	Tube furnace set to 0
5/22/2010	9:24:23 AM	Helium valve closed
5/22/2010	9:24:23 AM	H2 valve closed
5/22/2010	9:24:23 AM	BCl3 valve closed
5/22/2010	9:24:23 AM	PH3 valve closed
5/22/2010	9:24:23 AM	SiCl4 pre valve closed
5/22/2010	9:24:23 AM	SiCl4 post valve closed
5/22/2010	9:24:23 AM	Main Vac valve closed
5/22/2010	9:24:23 AM	Bubbler valve closed
5/22/2010	9:24:23 AM	Bypass valve opened
5/22/2010	9:24:23 AM	Helium MFC set to  0.000000
5/22/2010	9:24:23 AM	H2 MFC set to  0.000000
5/22/2010	9:24:23 AM	BCl3 MFC set to  0.000000
5/22/2010	9:24:23 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:24:23 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:24:23 AM	Tube furnace set to 0
5/22/2010	9:24:56 AM	Helium valve closed
5/22/2010	9:24:56 AM	H2 valve closed
5/22/2010	9:24:56 AM	BCl3 valve closed
5/22/2010	9:24:56 AM	PH3 valve closed
5/22/2010	9:24:56 AM	SiCl4 pre valve closed
5/22/2010	9:24:56 AM	SiCl4 post valve closed
5/22/2010	9:24:56 AM	Bubbler valve closed
5/22/2010	9:24:56 AM	Main Vac valve opened
5/22/2010	9:24:56 AM	Bypass valve opened
5/22/2010	9:24:56 AM	Helium MFC set to  0.000000
5/22/2010	9:24:56 AM	H2 MFC set to  0.000000
5/22/2010	9:24:56 AM	BCl3 MFC set to  0.000000
5/22/2010	9:24:56 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:24:56 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:24:56 AM	Tube furnace set to 0
5/22/2010	9:29:56 AM	Helium valve closed
5/22/2010	9:29:56 AM	H2 valve closed
5/22/2010	9:29:56 AM	BCl3 valve closed
5/22/2010	9:29:56 AM	PH3 valve closed
5/22/2010	9:29:56 AM	SiCl4 pre valve closed
5/22/2010	9:29:56 AM	SiCl4 post valve closed
5/22/2010	9:29:56 AM	Bubbler valve closed
5/22/2010	9:29:56 AM	Main Vac valve opened
5/22/2010	9:29:56 AM	Bypass valve opened
5/22/2010	9:29:56 AM	Helium MFC set to  0.000000
5/22/2010	9:29:56 AM	H2 MFC set to  0.000000
5/22/2010	9:29:56 AM	BCl3 MFC set to  0.000000
5/22/2010	9:29:56 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:29:56 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:29:56 AM	Tube furnace set to 0
5/22/2010	9:29:57 AM	Run finished at 9:29 AM
5/22/2010	9:29:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	9:30:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	9:30:10 AM	Recipe started at 9:30 AM
5/22/2010	9:30:10 AM	Helium valve closed
5/22/2010	9:30:10 AM	H2 valve closed
5/22/2010	9:30:10 AM	BCl3 valve closed
5/22/2010	9:30:10 AM	PH3 valve closed
5/22/2010	9:30:10 AM	SiCl4 pre valve closed
5/22/2010	9:30:10 AM	SiCl4 post valve closed
5/22/2010	9:30:10 AM	Main Vac valve closed
5/22/2010	9:30:10 AM	Bypass valve closed
5/22/2010	9:30:10 AM	Bubbler valve closed
5/22/2010	9:30:10 AM	Helium MFC set to  0.000000
5/22/2010	9:30:10 AM	H2 MFC set to  0.000000
5/22/2010	9:30:10 AM	BCl3 MFC set to  0.000000
5/22/2010	9:30:10 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:30:10 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:30:10 AM	Tube furnace set to 0
5/22/2010	9:30:11 AM	Run finished at 9:30 AM
5/22/2010	9:30:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	9:30:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	9:30:20 AM	Recipe started at 9:30 AM
5/22/2010	9:30:20 AM	H2 valve closed
5/22/2010	9:30:20 AM	BCl3 valve closed
5/22/2010	9:30:20 AM	PH3 valve closed
5/22/2010	9:30:20 AM	SiCl4 pre valve closed
5/22/2010	9:30:20 AM	SiCl4 post valve closed
5/22/2010	9:30:20 AM	Main Vac valve closed
5/22/2010	9:30:20 AM	Bypass valve closed
5/22/2010	9:30:20 AM	Bubbler valve closed
5/22/2010	9:30:20 AM	Helium valve opened
5/22/2010	9:30:20 AM	Helium MFC set to  500.000000
5/22/2010	9:30:20 AM	H2 MFC set to  0.000000
5/22/2010	9:30:20 AM	BCl3 MFC set to  0.000000
5/22/2010	9:30:20 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:30:20 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:30:20 AM	Tube furnace set to 0
5/22/2010	9:31:40 AM	Helium valve closed
5/22/2010	9:31:40 AM	H2 valve closed
5/22/2010	9:31:40 AM	BCl3 valve closed
5/22/2010	9:31:40 AM	PH3 valve closed
5/22/2010	9:31:40 AM	SiCl4 pre valve closed
5/22/2010	9:31:40 AM	SiCl4 post valve closed
5/22/2010	9:31:40 AM	Main Vac valve closed
5/22/2010	9:31:40 AM	Bypass valve closed
5/22/2010	9:31:40 AM	Bubbler valve closed
5/22/2010	9:31:40 AM	Helium MFC set to  0.000000
5/22/2010	9:31:40 AM	H2 MFC set to  0.000000
5/22/2010	9:31:40 AM	BCl3 MFC set to  0.000000
5/22/2010	9:31:40 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:31:40 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:31:40 AM	Tube furnace set to 0
5/22/2010	9:31:40 AM	Run finished at 9:31 AM
5/22/2010	9:31:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	9:33:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	9:33:41 AM	Recipe started at 9:33 AM
5/22/2010	9:33:41 AM	Helium valve closed
5/22/2010	9:33:41 AM	H2 valve closed
5/22/2010	9:33:41 AM	BCl3 valve closed
5/22/2010	9:33:41 AM	PH3 valve closed
5/22/2010	9:33:41 AM	SiCl4 pre valve closed
5/22/2010	9:33:41 AM	SiCl4 post valve closed
5/22/2010	9:33:41 AM	Main Vac valve closed
5/22/2010	9:33:41 AM	Bubbler valve closed
5/22/2010	9:33:41 AM	Bypass valve opened
5/22/2010	9:33:41 AM	Helium MFC set to  0.000000
5/22/2010	9:33:41 AM	H2 MFC set to  0.000000
5/22/2010	9:33:41 AM	BCl3 MFC set to  0.000000
5/22/2010	9:33:41 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:33:41 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:33:41 AM	Tube furnace set to 0
5/22/2010	9:34:27 AM	Helium valve closed
5/22/2010	9:34:27 AM	H2 valve closed
5/22/2010	9:34:27 AM	BCl3 valve closed
5/22/2010	9:34:27 AM	PH3 valve closed
5/22/2010	9:34:27 AM	SiCl4 pre valve closed
5/22/2010	9:34:27 AM	SiCl4 post valve closed
5/22/2010	9:34:27 AM	Bubbler valve closed
5/22/2010	9:34:27 AM	Main Vac valve opened
5/22/2010	9:34:27 AM	Bypass valve opened
5/22/2010	9:34:27 AM	Helium MFC set to  0.000000
5/22/2010	9:34:27 AM	H2 MFC set to  0.000000
5/22/2010	9:34:27 AM	BCl3 MFC set to  0.000000
5/22/2010	9:34:27 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:34:27 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:34:27 AM	Tube furnace set to 0
5/22/2010	9:34:27 AM	Run finished at 9:34 AM
5/22/2010	9:34:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	9:34:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	9:34:47 AM	Recipe started at 9:34 AM
5/22/2010	9:34:47 AM	H2 valve closed
5/22/2010	9:34:47 AM	BCl3 valve closed
5/22/2010	9:34:47 AM	PH3 valve closed
5/22/2010	9:34:47 AM	SiCl4 pre valve closed
5/22/2010	9:34:47 AM	SiCl4 post valve closed
5/22/2010	9:34:47 AM	Main Vac valve closed
5/22/2010	9:34:47 AM	Bypass valve closed
5/22/2010	9:34:47 AM	Bubbler valve closed
5/22/2010	9:34:47 AM	Helium valve opened
5/22/2010	9:34:47 AM	Helium MFC set to  500.000000
5/22/2010	9:34:47 AM	H2 MFC set to  0.000000
5/22/2010	9:34:47 AM	BCl3 MFC set to  0.000000
5/22/2010	9:34:47 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:34:47 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:34:47 AM	Tube furnace set to 0
5/22/2010	9:36:10 AM	Helium valve closed
5/22/2010	9:36:10 AM	H2 valve closed
5/22/2010	9:36:10 AM	BCl3 valve closed
5/22/2010	9:36:10 AM	PH3 valve closed
5/22/2010	9:36:10 AM	SiCl4 pre valve closed
5/22/2010	9:36:10 AM	SiCl4 post valve closed
5/22/2010	9:36:10 AM	Main Vac valve closed
5/22/2010	9:36:10 AM	Bypass valve closed
5/22/2010	9:36:10 AM	Bubbler valve closed
5/22/2010	9:36:10 AM	Helium MFC set to  0.000000
5/22/2010	9:36:10 AM	H2 MFC set to  0.000000
5/22/2010	9:36:10 AM	BCl3 MFC set to  0.000000
5/22/2010	9:36:10 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:36:10 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:36:10 AM	Tube furnace set to 0
5/22/2010	9:36:25 AM	Helium valve closed
5/22/2010	9:36:25 AM	H2 valve closed
5/22/2010	9:36:25 AM	BCl3 valve closed
5/22/2010	9:36:25 AM	PH3 valve closed
5/22/2010	9:36:25 AM	SiCl4 pre valve closed
5/22/2010	9:36:25 AM	SiCl4 post valve closed
5/22/2010	9:36:25 AM	Main Vac valve closed
5/22/2010	9:36:25 AM	Bubbler valve closed
5/22/2010	9:36:25 AM	Bypass valve opened
5/22/2010	9:36:25 AM	Helium MFC set to  0.000000
5/22/2010	9:36:25 AM	H2 MFC set to  0.000000
5/22/2010	9:36:25 AM	BCl3 MFC set to  0.000000
5/22/2010	9:36:25 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:36:25 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:36:25 AM	Tube furnace set to 0
5/22/2010	9:36:58 AM	Helium valve closed
5/22/2010	9:36:58 AM	H2 valve closed
5/22/2010	9:36:58 AM	BCl3 valve closed
5/22/2010	9:36:58 AM	PH3 valve closed
5/22/2010	9:36:58 AM	SiCl4 pre valve closed
5/22/2010	9:36:58 AM	SiCl4 post valve closed
5/22/2010	9:36:58 AM	Bubbler valve closed
5/22/2010	9:36:58 AM	Main Vac valve opened
5/22/2010	9:36:58 AM	Bypass valve opened
5/22/2010	9:36:58 AM	Helium MFC set to  0.000000
5/22/2010	9:36:58 AM	H2 MFC set to  0.000000
5/22/2010	9:36:58 AM	BCl3 MFC set to  0.000000
5/22/2010	9:36:58 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:36:58 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:36:59 AM	Tube furnace set to 0
5/22/2010	9:41:59 AM	H2 valve closed
5/22/2010	9:41:59 AM	BCl3 valve closed
5/22/2010	9:41:59 AM	PH3 valve closed
5/22/2010	9:41:59 AM	SiCl4 pre valve closed
5/22/2010	9:41:59 AM	SiCl4 post valve closed
5/22/2010	9:41:59 AM	Main Vac valve closed
5/22/2010	9:41:59 AM	Bypass valve closed
5/22/2010	9:41:59 AM	Bubbler valve closed
5/22/2010	9:41:59 AM	Helium valve opened
5/22/2010	9:41:59 AM	Helium MFC set to  500.000000
5/22/2010	9:41:59 AM	H2 MFC set to  0.000000
5/22/2010	9:41:59 AM	BCl3 MFC set to  0.000000
5/22/2010	9:41:59 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:41:59 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:41:59 AM	Tube furnace set to 0
5/22/2010	9:43:22 AM	Helium valve closed
5/22/2010	9:43:22 AM	H2 valve closed
5/22/2010	9:43:22 AM	BCl3 valve closed
5/22/2010	9:43:22 AM	PH3 valve closed
5/22/2010	9:43:22 AM	SiCl4 pre valve closed
5/22/2010	9:43:22 AM	SiCl4 post valve closed
5/22/2010	9:43:22 AM	Main Vac valve closed
5/22/2010	9:43:22 AM	Bypass valve closed
5/22/2010	9:43:22 AM	Bubbler valve closed
5/22/2010	9:43:22 AM	Helium MFC set to  0.000000
5/22/2010	9:43:22 AM	H2 MFC set to  0.000000
5/22/2010	9:43:22 AM	BCl3 MFC set to  0.000000
5/22/2010	9:43:22 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:43:22 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:43:22 AM	Tube furnace set to 0
5/22/2010	9:43:37 AM	Helium valve closed
5/22/2010	9:43:37 AM	H2 valve closed
5/22/2010	9:43:37 AM	BCl3 valve closed
5/22/2010	9:43:37 AM	PH3 valve closed
5/22/2010	9:43:37 AM	SiCl4 pre valve closed
5/22/2010	9:43:37 AM	SiCl4 post valve closed
5/22/2010	9:43:37 AM	Main Vac valve closed
5/22/2010	9:43:37 AM	Bubbler valve closed
5/22/2010	9:43:37 AM	Bypass valve opened
5/22/2010	9:43:37 AM	Helium MFC set to  0.000000
5/22/2010	9:43:37 AM	H2 MFC set to  0.000000
5/22/2010	9:43:37 AM	BCl3 MFC set to  0.000000
5/22/2010	9:43:37 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:43:37 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:43:37 AM	Tube furnace set to 0
5/22/2010	9:44:10 AM	Helium valve closed
5/22/2010	9:44:10 AM	H2 valve closed
5/22/2010	9:44:10 AM	BCl3 valve closed
5/22/2010	9:44:10 AM	PH3 valve closed
5/22/2010	9:44:10 AM	SiCl4 pre valve closed
5/22/2010	9:44:10 AM	SiCl4 post valve closed
5/22/2010	9:44:10 AM	Bubbler valve closed
5/22/2010	9:44:10 AM	Main Vac valve opened
5/22/2010	9:44:10 AM	Bypass valve opened
5/22/2010	9:44:10 AM	Helium MFC set to  0.000000
5/22/2010	9:44:10 AM	H2 MFC set to  0.000000
5/22/2010	9:44:10 AM	BCl3 MFC set to  0.000000
5/22/2010	9:44:10 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:44:10 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:44:11 AM	Tube furnace set to 0
5/22/2010	9:49:11 AM	H2 valve closed
5/22/2010	9:49:11 AM	BCl3 valve closed
5/22/2010	9:49:11 AM	PH3 valve closed
5/22/2010	9:49:11 AM	SiCl4 pre valve closed
5/22/2010	9:49:11 AM	SiCl4 post valve closed
5/22/2010	9:49:11 AM	Main Vac valve closed
5/22/2010	9:49:11 AM	Bypass valve closed
5/22/2010	9:49:11 AM	Bubbler valve closed
5/22/2010	9:49:11 AM	Helium valve opened
5/22/2010	9:49:11 AM	Helium MFC set to  500.000000
5/22/2010	9:49:11 AM	H2 MFC set to  0.000000
5/22/2010	9:49:11 AM	BCl3 MFC set to  0.000000
5/22/2010	9:49:11 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:49:11 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:49:11 AM	Tube furnace set to 0
5/22/2010	9:50:34 AM	Helium valve closed
5/22/2010	9:50:34 AM	H2 valve closed
5/22/2010	9:50:34 AM	BCl3 valve closed
5/22/2010	9:50:34 AM	PH3 valve closed
5/22/2010	9:50:34 AM	SiCl4 pre valve closed
5/22/2010	9:50:34 AM	SiCl4 post valve closed
5/22/2010	9:50:34 AM	Main Vac valve closed
5/22/2010	9:50:34 AM	Bypass valve closed
5/22/2010	9:50:34 AM	Bubbler valve closed
5/22/2010	9:50:34 AM	Helium MFC set to  0.000000
5/22/2010	9:50:34 AM	H2 MFC set to  0.000000
5/22/2010	9:50:34 AM	BCl3 MFC set to  0.000000
5/22/2010	9:50:34 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:50:34 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:50:34 AM	Tube furnace set to 0
5/22/2010	9:50:49 AM	Helium valve closed
5/22/2010	9:50:49 AM	H2 valve closed
5/22/2010	9:50:49 AM	BCl3 valve closed
5/22/2010	9:50:49 AM	PH3 valve closed
5/22/2010	9:50:49 AM	SiCl4 pre valve closed
5/22/2010	9:50:49 AM	SiCl4 post valve closed
5/22/2010	9:50:49 AM	Main Vac valve closed
5/22/2010	9:50:49 AM	Bubbler valve closed
5/22/2010	9:50:49 AM	Bypass valve opened
5/22/2010	9:50:49 AM	Helium MFC set to  0.000000
5/22/2010	9:50:49 AM	H2 MFC set to  0.000000
5/22/2010	9:50:49 AM	BCl3 MFC set to  0.000000
5/22/2010	9:50:49 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:50:49 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:50:49 AM	Tube furnace set to 0
5/22/2010	9:51:22 AM	Helium valve closed
5/22/2010	9:51:22 AM	H2 valve closed
5/22/2010	9:51:22 AM	BCl3 valve closed
5/22/2010	9:51:22 AM	PH3 valve closed
5/22/2010	9:51:22 AM	SiCl4 pre valve closed
5/22/2010	9:51:22 AM	SiCl4 post valve closed
5/22/2010	9:51:22 AM	Bubbler valve closed
5/22/2010	9:51:22 AM	Main Vac valve opened
5/22/2010	9:51:22 AM	Bypass valve opened
5/22/2010	9:51:22 AM	Helium MFC set to  0.000000
5/22/2010	9:51:22 AM	H2 MFC set to  0.000000
5/22/2010	9:51:22 AM	BCl3 MFC set to  0.000000
5/22/2010	9:51:22 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:51:22 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:51:23 AM	Tube furnace set to 0
5/22/2010	9:56:23 AM	Helium valve closed
5/22/2010	9:56:23 AM	H2 valve closed
5/22/2010	9:56:23 AM	BCl3 valve closed
5/22/2010	9:56:23 AM	PH3 valve closed
5/22/2010	9:56:23 AM	SiCl4 pre valve closed
5/22/2010	9:56:23 AM	SiCl4 post valve closed
5/22/2010	9:56:23 AM	Bubbler valve closed
5/22/2010	9:56:23 AM	Main Vac valve opened
5/22/2010	9:56:23 AM	Bypass valve opened
5/22/2010	9:56:23 AM	Helium MFC set to  0.000000
5/22/2010	9:56:23 AM	H2 MFC set to  0.000000
5/22/2010	9:56:23 AM	BCl3 MFC set to  0.000000
5/22/2010	9:56:23 AM	SiCl4 MFC set to  0.000000
5/22/2010	9:56:23 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:56:23 AM	Tube furnace set to 0
5/22/2010	9:56:24 AM	Run finished at 9:56 AM
5/22/2010	9:56:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	10:02:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	10:02:27 AM	Recipe started at 10:02 AM
5/22/2010	10:02:27 AM	Helium valve closed
5/22/2010	10:02:27 AM	H2 valve closed
5/22/2010	10:02:27 AM	BCl3 valve closed
5/22/2010	10:02:27 AM	PH3 valve closed
5/22/2010	10:02:27 AM	SiCl4 pre valve closed
5/22/2010	10:02:27 AM	SiCl4 post valve closed
5/22/2010	10:02:27 AM	Main Vac valve closed
5/22/2010	10:02:27 AM	Bypass valve closed
5/22/2010	10:02:27 AM	Bubbler valve closed
5/22/2010	10:02:27 AM	Helium MFC set to  0.000000
5/22/2010	10:02:27 AM	H2 MFC set to  0.000000
5/22/2010	10:02:27 AM	BCl3 MFC set to  0.000000
5/22/2010	10:02:27 AM	SiCl4 MFC set to  0.000000
5/22/2010	10:02:27 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:02:27 AM	Tube furnace set to 0
5/22/2010	10:02:27 AM	Run finished at 10:02 AM
5/22/2010	10:02:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	10:02:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	10:02:50 AM	Recipe started at 10:02 AM
5/22/2010	10:02:50 AM	H2 valve closed
5/22/2010	10:02:50 AM	BCl3 valve closed
5/22/2010	10:02:50 AM	PH3 valve closed
5/22/2010	10:02:50 AM	SiCl4 pre valve closed
5/22/2010	10:02:50 AM	SiCl4 post valve closed
5/22/2010	10:02:50 AM	Main Vac valve closed
5/22/2010	10:02:50 AM	Bypass valve closed
5/22/2010	10:02:50 AM	Bubbler valve closed
5/22/2010	10:02:50 AM	Helium valve opened
5/22/2010	10:02:50 AM	Helium MFC set to  500.000000
5/22/2010	10:02:50 AM	H2 MFC set to  0.000000
5/22/2010	10:02:50 AM	BCl3 MFC set to  0.000000
5/22/2010	10:02:50 AM	SiCl4 MFC set to  0.000000
5/22/2010	10:02:50 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:02:50 AM	Tube furnace set to 0
5/22/2010	10:02:52 AM	Run aborted at 10:02 AM
5/22/2010	10:02:52 AM	Helium valve closed
5/22/2010	10:02:52 AM	H2 valve closed
5/22/2010	10:02:52 AM	BCl3 valve closed
5/22/2010	10:02:52 AM	PH3 valve closed
5/22/2010	10:02:52 AM	SiCl4 pre valve closed
5/22/2010	10:02:52 AM	SiCl4 post valve closed
5/22/2010	10:02:52 AM	Bypass valve closed
5/22/2010	10:02:52 AM	Main Vac valve closed
5/22/2010	10:02:52 AM	Bubbler valve closed
5/22/2010	10:02:52 AM	Helium MFC set to  0.000000
5/22/2010	10:02:52 AM	H2 MFC set to  0.000000
5/22/2010	10:02:52 AM	BCl3 MFC set to  0.000000
5/22/2010	10:02:52 AM	SiCl4 MFC set to  0.000000
5/22/2010	10:02:53 AM	Tube furnace set to 0
5/22/2010	10:02:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	10:02:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	10:02:54 AM	Recipe started at 10:02 AM
5/22/2010	10:02:54 AM	Helium valve closed
5/22/2010	10:02:54 AM	H2 valve closed
5/22/2010	10:02:54 AM	BCl3 valve closed
5/22/2010	10:02:54 AM	PH3 valve closed
5/22/2010	10:02:54 AM	SiCl4 pre valve closed
5/22/2010	10:02:54 AM	SiCl4 post valve closed
5/22/2010	10:02:54 AM	Main Vac valve closed
5/22/2010	10:02:54 AM	Bubbler valve closed
5/22/2010	10:02:54 AM	Bypass valve opened
5/22/2010	10:02:54 AM	Helium MFC set to  0.000000
5/22/2010	10:02:54 AM	H2 MFC set to  0.000000
5/22/2010	10:02:54 AM	BCl3 MFC set to  0.000000
5/22/2010	10:02:54 AM	SiCl4 MFC set to  0.000000
5/22/2010	10:02:54 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:02:54 AM	Tube furnace set to 0
5/22/2010	10:02:55 AM	Helium valve closed
5/22/2010	10:02:55 AM	H2 valve closed
5/22/2010	10:02:55 AM	BCl3 valve closed
5/22/2010	10:02:55 AM	PH3 valve closed
5/22/2010	10:02:55 AM	SiCl4 pre valve closed
5/22/2010	10:02:55 AM	SiCl4 post valve closed
5/22/2010	10:02:55 AM	Bubbler valve closed
5/22/2010	10:02:55 AM	Main Vac valve opened
5/22/2010	10:02:55 AM	Bypass valve opened
5/22/2010	10:02:55 AM	Helium MFC set to  0.000000
5/22/2010	10:02:55 AM	H2 MFC set to  0.000000
5/22/2010	10:02:55 AM	BCl3 MFC set to  0.000000
5/22/2010	10:02:55 AM	SiCl4 MFC set to  0.000000
5/22/2010	10:02:55 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:02:55 AM	Tube furnace set to 0
5/22/2010	10:02:55 AM	Run finished at 10:02 AM
5/22/2010	10:02:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	10:03:21 AM	Recipe started at 10:03 AM
5/22/2010	10:03:21 AM	Helium valve closed
5/22/2010	10:03:21 AM	BCl3 valve closed
5/22/2010	10:03:21 AM	PH3 valve closed
5/22/2010	10:03:21 AM	SiCl4 pre valve closed
5/22/2010	10:03:21 AM	SiCl4 post valve closed
5/22/2010	10:03:21 AM	Main Vac valve closed
5/22/2010	10:03:21 AM	Bypass valve closed
5/22/2010	10:03:21 AM	Bubbler valve closed
5/22/2010	10:03:21 AM	H2 valve opened
5/22/2010	10:03:21 AM	Helium MFC set to  0.000000
5/22/2010	10:03:21 AM	H2 MFC set to  500.000000
5/22/2010	10:03:21 AM	BCl3 MFC set to  0.000000
5/22/2010	10:03:21 AM	SiCl4 MFC set to  0.000000
5/22/2010	10:03:21 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:03:21 AM	Tube furnace set to 0
5/22/2010	10:04:44 AM	Helium valve closed
5/22/2010	10:04:44 AM	BCl3 valve closed
5/22/2010	10:04:44 AM	PH3 valve closed
5/22/2010	10:04:44 AM	SiCl4 pre valve closed
5/22/2010	10:04:44 AM	SiCl4 post valve closed
5/22/2010	10:04:44 AM	Main Vac valve closed
5/22/2010	10:04:44 AM	Bypass valve closed
5/22/2010	10:04:44 AM	H2 valve opened
5/22/2010	10:04:44 AM	Bubbler valve opened
5/22/2010	10:04:44 AM	Helium MFC set to  0.000000
5/22/2010	10:04:44 AM	H2 MFC set to  500.000000
5/22/2010	10:04:44 AM	BCl3 MFC set to  0.000000
5/22/2010	10:04:44 AM	SiCl4 MFC set to  0.000000
5/22/2010	10:04:44 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:04:44 AM	Tube furnace set to 1000
5/22/2010	10:24:44 AM	Helium valve closed
5/22/2010	10:24:44 AM	PH3 valve closed
5/22/2010	10:24:44 AM	SiCl4 pre valve closed
5/22/2010	10:24:44 AM	SiCl4 post valve closed
5/22/2010	10:24:44 AM	Main Vac valve closed
5/22/2010	10:24:44 AM	Bypass valve closed
5/22/2010	10:24:44 AM	H2 valve opened
5/22/2010	10:24:44 AM	BCl3 valve opened
5/22/2010	10:24:44 AM	Bubbler valve opened
5/22/2010	10:24:44 AM	Helium MFC set to  0.000000
5/22/2010	10:24:44 AM	H2 MFC set to  500.000000
5/22/2010	10:24:44 AM	BCl3 MFC set to  100.000000
5/22/2010	10:24:44 AM	SiCl4 MFC set to  0.000000
5/22/2010	10:24:44 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:24:44 AM	Tube furnace set to 1000
5/22/2010	10:44:44 AM	H2 valve closed
5/22/2010	10:44:44 AM	BCl3 valve closed
5/22/2010	10:44:44 AM	PH3 valve closed
5/22/2010	10:44:44 AM	SiCl4 pre valve closed
5/22/2010	10:44:44 AM	SiCl4 post valve closed
5/22/2010	10:44:44 AM	Main Vac valve closed
5/22/2010	10:44:44 AM	Bypass valve closed
5/22/2010	10:44:44 AM	Helium valve opened
5/22/2010	10:44:44 AM	Bubbler valve opened
5/22/2010	10:44:44 AM	Helium MFC set to  500.000000
5/22/2010	10:44:44 AM	H2 MFC set to  0.000000
5/22/2010	10:44:44 AM	BCl3 MFC set to  0.000000
5/22/2010	10:44:44 AM	SiCl4 MFC set to  0.000000
5/22/2010	10:44:44 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:44:44 AM	Tube furnace set to 0
5/22/2010	11:04:44 AM	Helium valve closed
5/22/2010	11:04:44 AM	H2 valve closed
5/22/2010	11:04:44 AM	BCl3 valve closed
5/22/2010	11:04:44 AM	PH3 valve closed
5/22/2010	11:04:44 AM	SiCl4 pre valve closed
5/22/2010	11:04:44 AM	SiCl4 post valve closed
5/22/2010	11:04:44 AM	Main Vac valve closed
5/22/2010	11:04:44 AM	Bypass valve closed
5/22/2010	11:04:44 AM	Bubbler valve closed
5/22/2010	11:04:44 AM	Helium MFC set to  0.000000
5/22/2010	11:04:44 AM	H2 MFC set to  0.000000
5/22/2010	11:04:44 AM	BCl3 MFC set to  0.000000
5/22/2010	11:04:44 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:04:44 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:04:45 AM	Tube furnace set to 0
5/22/2010	11:04:45 AM	Run finished at 11:04 AM
5/22/2010	11:14:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	11:14:52 AM	Recipe started at 11:14 AM
5/22/2010	11:14:52 AM	Helium valve closed
5/22/2010	11:14:52 AM	H2 valve closed
5/22/2010	11:14:52 AM	BCl3 valve closed
5/22/2010	11:14:52 AM	PH3 valve closed
5/22/2010	11:14:52 AM	SiCl4 pre valve closed
5/22/2010	11:14:52 AM	SiCl4 post valve closed
5/22/2010	11:14:52 AM	Main Vac valve closed
5/22/2010	11:14:52 AM	Bubbler valve closed
5/22/2010	11:14:52 AM	Bypass valve opened
5/22/2010	11:14:52 AM	Helium MFC set to  0.000000
5/22/2010	11:14:52 AM	H2 MFC set to  0.000000
5/22/2010	11:14:52 AM	BCl3 MFC set to  0.000000
5/22/2010	11:14:52 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:14:52 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:14:52 AM	Tube furnace set to 0
5/22/2010	11:15:37 AM	Helium valve closed
5/22/2010	11:15:37 AM	H2 valve closed
5/22/2010	11:15:37 AM	BCl3 valve closed
5/22/2010	11:15:37 AM	PH3 valve closed
5/22/2010	11:15:37 AM	SiCl4 pre valve closed
5/22/2010	11:15:37 AM	SiCl4 post valve closed
5/22/2010	11:15:37 AM	Bubbler valve closed
5/22/2010	11:15:37 AM	Main Vac valve opened
5/22/2010	11:15:37 AM	Bypass valve opened
5/22/2010	11:15:37 AM	Helium MFC set to  0.000000
5/22/2010	11:15:37 AM	H2 MFC set to  0.000000
5/22/2010	11:15:37 AM	BCl3 MFC set to  0.000000
5/22/2010	11:15:37 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:15:37 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:15:37 AM	Tube furnace set to 0
5/22/2010	11:15:38 AM	Run finished at 11:15 AM
5/22/2010	11:15:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	11:16:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	11:16:16 AM	Recipe started at 11:16 AM
5/22/2010	11:16:16 AM	H2 valve closed
5/22/2010	11:16:16 AM	BCl3 valve closed
5/22/2010	11:16:16 AM	PH3 valve closed
5/22/2010	11:16:16 AM	SiCl4 pre valve closed
5/22/2010	11:16:16 AM	SiCl4 post valve closed
5/22/2010	11:16:16 AM	Main Vac valve closed
5/22/2010	11:16:16 AM	Bypass valve closed
5/22/2010	11:16:16 AM	Bubbler valve closed
5/22/2010	11:16:16 AM	Helium valve opened
5/22/2010	11:16:16 AM	Helium MFC set to  500.000000
5/22/2010	11:16:16 AM	H2 MFC set to  0.000000
5/22/2010	11:16:16 AM	BCl3 MFC set to  0.000000
5/22/2010	11:16:16 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:16:16 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:16:16 AM	Tube furnace set to 0
5/22/2010	11:17:36 AM	Helium valve closed
5/22/2010	11:17:36 AM	H2 valve closed
5/22/2010	11:17:36 AM	BCl3 valve closed
5/22/2010	11:17:36 AM	PH3 valve closed
5/22/2010	11:17:36 AM	SiCl4 pre valve closed
5/22/2010	11:17:36 AM	SiCl4 post valve closed
5/22/2010	11:17:36 AM	Main Vac valve closed
5/22/2010	11:17:36 AM	Bypass valve closed
5/22/2010	11:17:36 AM	Bubbler valve closed
5/22/2010	11:17:36 AM	Helium MFC set to  0.000000
5/22/2010	11:17:36 AM	H2 MFC set to  0.000000
5/22/2010	11:17:36 AM	BCl3 MFC set to  0.000000
5/22/2010	11:17:36 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:17:36 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:17:36 AM	Tube furnace set to 0
5/22/2010	11:17:51 AM	Helium valve closed
5/22/2010	11:17:51 AM	H2 valve closed
5/22/2010	11:17:51 AM	BCl3 valve closed
5/22/2010	11:17:51 AM	PH3 valve closed
5/22/2010	11:17:51 AM	SiCl4 pre valve closed
5/22/2010	11:17:51 AM	SiCl4 post valve closed
5/22/2010	11:17:51 AM	Main Vac valve closed
5/22/2010	11:17:51 AM	Bubbler valve closed
5/22/2010	11:17:51 AM	Bypass valve opened
5/22/2010	11:17:51 AM	Helium MFC set to  0.000000
5/22/2010	11:17:51 AM	H2 MFC set to  0.000000
5/22/2010	11:17:51 AM	BCl3 MFC set to  0.000000
5/22/2010	11:17:51 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:17:51 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:17:51 AM	Tube furnace set to 0
5/22/2010	11:18:23 AM	Helium valve closed
5/22/2010	11:18:23 AM	H2 valve closed
5/22/2010	11:18:23 AM	BCl3 valve closed
5/22/2010	11:18:23 AM	PH3 valve closed
5/22/2010	11:18:23 AM	SiCl4 pre valve closed
5/22/2010	11:18:23 AM	SiCl4 post valve closed
5/22/2010	11:18:23 AM	Bubbler valve closed
5/22/2010	11:18:23 AM	Main Vac valve opened
5/22/2010	11:18:23 AM	Bypass valve opened
5/22/2010	11:18:23 AM	Helium MFC set to  0.000000
5/22/2010	11:18:23 AM	H2 MFC set to  0.000000
5/22/2010	11:18:23 AM	BCl3 MFC set to  0.000000
5/22/2010	11:18:23 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:18:23 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:18:23 AM	Tube furnace set to 0
5/22/2010	11:23:23 AM	H2 valve closed
5/22/2010	11:23:23 AM	BCl3 valve closed
5/22/2010	11:23:23 AM	PH3 valve closed
5/22/2010	11:23:23 AM	SiCl4 pre valve closed
5/22/2010	11:23:23 AM	SiCl4 post valve closed
5/22/2010	11:23:23 AM	Main Vac valve closed
5/22/2010	11:23:23 AM	Bypass valve closed
5/22/2010	11:23:23 AM	Bubbler valve closed
5/22/2010	11:23:23 AM	Helium valve opened
5/22/2010	11:23:23 AM	Helium MFC set to  500.000000
5/22/2010	11:23:23 AM	H2 MFC set to  0.000000
5/22/2010	11:23:23 AM	BCl3 MFC set to  0.000000
5/22/2010	11:23:23 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:23:23 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:23:23 AM	Tube furnace set to 0
5/22/2010	11:24:41 AM	Helium valve closed
5/22/2010	11:24:41 AM	H2 valve closed
5/22/2010	11:24:41 AM	BCl3 valve closed
5/22/2010	11:24:41 AM	PH3 valve closed
5/22/2010	11:24:41 AM	SiCl4 pre valve closed
5/22/2010	11:24:41 AM	SiCl4 post valve closed
5/22/2010	11:24:41 AM	Main Vac valve closed
5/22/2010	11:24:41 AM	Bypass valve closed
5/22/2010	11:24:41 AM	Bubbler valve closed
5/22/2010	11:24:41 AM	Helium MFC set to  0.000000
5/22/2010	11:24:41 AM	H2 MFC set to  0.000000
5/22/2010	11:24:41 AM	BCl3 MFC set to  0.000000
5/22/2010	11:24:41 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:24:41 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:24:42 AM	Tube furnace set to 0
5/22/2010	11:24:57 AM	Helium valve closed
5/22/2010	11:24:57 AM	H2 valve closed
5/22/2010	11:24:57 AM	BCl3 valve closed
5/22/2010	11:24:57 AM	PH3 valve closed
5/22/2010	11:24:57 AM	SiCl4 pre valve closed
5/22/2010	11:24:57 AM	SiCl4 post valve closed
5/22/2010	11:24:57 AM	Main Vac valve closed
5/22/2010	11:24:57 AM	Bubbler valve closed
5/22/2010	11:24:57 AM	Bypass valve opened
5/22/2010	11:24:57 AM	Helium MFC set to  0.000000
5/22/2010	11:24:57 AM	H2 MFC set to  0.000000
5/22/2010	11:24:57 AM	BCl3 MFC set to  0.000000
5/22/2010	11:24:57 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:24:57 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:24:57 AM	Tube furnace set to 0
5/22/2010	11:25:28 AM	Helium valve closed
5/22/2010	11:25:28 AM	H2 valve closed
5/22/2010	11:25:28 AM	BCl3 valve closed
5/22/2010	11:25:28 AM	PH3 valve closed
5/22/2010	11:25:28 AM	SiCl4 pre valve closed
5/22/2010	11:25:28 AM	SiCl4 post valve closed
5/22/2010	11:25:28 AM	Bubbler valve closed
5/22/2010	11:25:28 AM	Main Vac valve opened
5/22/2010	11:25:28 AM	Bypass valve opened
5/22/2010	11:25:28 AM	Helium MFC set to  0.000000
5/22/2010	11:25:28 AM	H2 MFC set to  0.000000
5/22/2010	11:25:28 AM	BCl3 MFC set to  0.000000
5/22/2010	11:25:28 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:25:28 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:25:28 AM	Tube furnace set to 0
5/22/2010	11:30:28 AM	H2 valve closed
5/22/2010	11:30:28 AM	BCl3 valve closed
5/22/2010	11:30:28 AM	PH3 valve closed
5/22/2010	11:30:28 AM	SiCl4 pre valve closed
5/22/2010	11:30:28 AM	SiCl4 post valve closed
5/22/2010	11:30:28 AM	Main Vac valve closed
5/22/2010	11:30:28 AM	Bypass valve closed
5/22/2010	11:30:28 AM	Bubbler valve closed
5/22/2010	11:30:28 AM	Helium valve opened
5/22/2010	11:30:28 AM	Helium MFC set to  500.000000
5/22/2010	11:30:28 AM	H2 MFC set to  0.000000
5/22/2010	11:30:28 AM	BCl3 MFC set to  0.000000
5/22/2010	11:30:28 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:30:28 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:30:28 AM	Tube furnace set to 0
5/22/2010	11:31:46 AM	Helium valve closed
5/22/2010	11:31:46 AM	H2 valve closed
5/22/2010	11:31:46 AM	BCl3 valve closed
5/22/2010	11:31:46 AM	PH3 valve closed
5/22/2010	11:31:46 AM	SiCl4 pre valve closed
5/22/2010	11:31:46 AM	SiCl4 post valve closed
5/22/2010	11:31:46 AM	Main Vac valve closed
5/22/2010	11:31:46 AM	Bypass valve closed
5/22/2010	11:31:46 AM	Bubbler valve closed
5/22/2010	11:31:46 AM	Helium MFC set to  0.000000
5/22/2010	11:31:46 AM	H2 MFC set to  0.000000
5/22/2010	11:31:46 AM	BCl3 MFC set to  0.000000
5/22/2010	11:31:46 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:31:46 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:31:46 AM	Tube furnace set to 0
5/22/2010	11:32:01 AM	Helium valve closed
5/22/2010	11:32:01 AM	H2 valve closed
5/22/2010	11:32:01 AM	BCl3 valve closed
5/22/2010	11:32:01 AM	PH3 valve closed
5/22/2010	11:32:01 AM	SiCl4 pre valve closed
5/22/2010	11:32:01 AM	SiCl4 post valve closed
5/22/2010	11:32:01 AM	Main Vac valve closed
5/22/2010	11:32:01 AM	Bubbler valve closed
5/22/2010	11:32:01 AM	Bypass valve opened
5/22/2010	11:32:01 AM	Helium MFC set to  0.000000
5/22/2010	11:32:01 AM	H2 MFC set to  0.000000
5/22/2010	11:32:01 AM	BCl3 MFC set to  0.000000
5/22/2010	11:32:01 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:32:01 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:32:01 AM	Tube furnace set to 0
5/22/2010	11:32:32 AM	Helium valve closed
5/22/2010	11:32:32 AM	H2 valve closed
5/22/2010	11:32:32 AM	BCl3 valve closed
5/22/2010	11:32:33 AM	PH3 valve closed
5/22/2010	11:32:33 AM	SiCl4 pre valve closed
5/22/2010	11:32:33 AM	SiCl4 post valve closed
5/22/2010	11:32:33 AM	Bubbler valve closed
5/22/2010	11:32:33 AM	Main Vac valve opened
5/22/2010	11:32:33 AM	Bypass valve opened
5/22/2010	11:32:33 AM	Helium MFC set to  0.000000
5/22/2010	11:32:33 AM	H2 MFC set to  0.000000
5/22/2010	11:32:33 AM	BCl3 MFC set to  0.000000
5/22/2010	11:32:33 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:32:33 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:32:33 AM	Tube furnace set to 0
5/22/2010	11:37:33 AM	Helium valve closed
5/22/2010	11:37:33 AM	H2 valve closed
5/22/2010	11:37:33 AM	BCl3 valve closed
5/22/2010	11:37:33 AM	PH3 valve closed
5/22/2010	11:37:33 AM	SiCl4 pre valve closed
5/22/2010	11:37:33 AM	SiCl4 post valve closed
5/22/2010	11:37:33 AM	Bubbler valve closed
5/22/2010	11:37:33 AM	Main Vac valve opened
5/22/2010	11:37:33 AM	Bypass valve opened
5/22/2010	11:37:33 AM	Helium MFC set to  0.000000
5/22/2010	11:37:33 AM	H2 MFC set to  0.000000
5/22/2010	11:37:33 AM	BCl3 MFC set to  0.000000
5/22/2010	11:37:33 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:37:33 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:37:33 AM	Tube furnace set to 0
5/22/2010	11:37:34 AM	Run finished at 11:37 AM
5/22/2010	11:37:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	11:38:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	11:38:23 AM	Recipe started at 11:38 AM
5/22/2010	11:38:23 AM	Helium valve closed
5/22/2010	11:38:23 AM	H2 valve closed
5/22/2010	11:38:23 AM	BCl3 valve closed
5/22/2010	11:38:23 AM	PH3 valve closed
5/22/2010	11:38:23 AM	SiCl4 pre valve closed
5/22/2010	11:38:23 AM	SiCl4 post valve closed
5/22/2010	11:38:23 AM	Main Vac valve closed
5/22/2010	11:38:23 AM	Bypass valve closed
5/22/2010	11:38:23 AM	Bubbler valve closed
5/22/2010	11:38:23 AM	Helium MFC set to  0.000000
5/22/2010	11:38:23 AM	H2 MFC set to  0.000000
5/22/2010	11:38:23 AM	BCl3 MFC set to  0.000000
5/22/2010	11:38:23 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:38:23 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:38:24 AM	Tube furnace set to 0
5/22/2010	11:38:24 AM	Run finished at 11:38 AM
5/22/2010	11:38:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	11:38:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	11:38:40 AM	Recipe started at 11:38 AM
5/22/2010	11:38:40 AM	Helium valve closed
5/22/2010	11:38:40 AM	H2 valve closed
5/22/2010	11:38:40 AM	BCl3 valve closed
5/22/2010	11:38:40 AM	PH3 valve closed
5/22/2010	11:38:40 AM	SiCl4 pre valve closed
5/22/2010	11:38:40 AM	SiCl4 post valve closed
5/22/2010	11:38:40 AM	Main Vac valve closed
5/22/2010	11:38:40 AM	Bubbler valve closed
5/22/2010	11:38:40 AM	Bypass valve opened
5/22/2010	11:38:40 AM	Helium MFC set to  0.000000
5/22/2010	11:38:40 AM	H2 MFC set to  0.000000
5/22/2010	11:38:40 AM	BCl3 MFC set to  0.000000
5/22/2010	11:38:40 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:38:40 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:38:41 AM	Tube furnace set to 0
5/22/2010	11:38:41 AM	Helium valve closed
5/22/2010	11:38:41 AM	H2 valve closed
5/22/2010	11:38:41 AM	BCl3 valve closed
5/22/2010	11:38:41 AM	PH3 valve closed
5/22/2010	11:38:41 AM	SiCl4 pre valve closed
5/22/2010	11:38:41 AM	SiCl4 post valve closed
5/22/2010	11:38:41 AM	Bubbler valve closed
5/22/2010	11:38:41 AM	Main Vac valve opened
5/22/2010	11:38:41 AM	Bypass valve opened
5/22/2010	11:38:41 AM	Helium MFC set to  0.000000
5/22/2010	11:38:41 AM	H2 MFC set to  0.000000
5/22/2010	11:38:41 AM	BCl3 MFC set to  0.000000
5/22/2010	11:38:41 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:38:41 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:38:41 AM	Tube furnace set to 0
5/22/2010	11:38:41 AM	Run finished at 11:38 AM
5/22/2010	11:38:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	11:39:42 AM	Recipe started at 11:39 AM
5/22/2010	11:39:42 AM	Helium valve closed
5/22/2010	11:39:42 AM	BCl3 valve closed
5/22/2010	11:39:42 AM	PH3 valve closed
5/22/2010	11:39:42 AM	SiCl4 pre valve closed
5/22/2010	11:39:42 AM	SiCl4 post valve closed
5/22/2010	11:39:42 AM	Main Vac valve closed
5/22/2010	11:39:42 AM	Bypass valve closed
5/22/2010	11:39:42 AM	Bubbler valve closed
5/22/2010	11:39:42 AM	H2 valve opened
5/22/2010	11:39:42 AM	Helium MFC set to  0.000000
5/22/2010	11:39:42 AM	H2 MFC set to  500.000000
5/22/2010	11:39:42 AM	BCl3 MFC set to  0.000000
5/22/2010	11:39:42 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:39:42 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:39:42 AM	Tube furnace set to 0
5/22/2010	11:41:00 AM	Helium valve closed
5/22/2010	11:41:00 AM	BCl3 valve closed
5/22/2010	11:41:00 AM	PH3 valve closed
5/22/2010	11:41:00 AM	SiCl4 pre valve closed
5/22/2010	11:41:00 AM	SiCl4 post valve closed
5/22/2010	11:41:00 AM	Main Vac valve closed
5/22/2010	11:41:00 AM	Bypass valve closed
5/22/2010	11:41:00 AM	H2 valve opened
5/22/2010	11:41:00 AM	Bubbler valve opened
5/22/2010	11:41:00 AM	Helium MFC set to  0.000000
5/22/2010	11:41:00 AM	H2 MFC set to  500.000000
5/22/2010	11:41:00 AM	BCl3 MFC set to  0.000000
5/22/2010	11:41:00 AM	SiCl4 MFC set to  0.000000
5/22/2010	11:41:00 AM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:41:00 AM	Tube furnace set to 1000
5/22/2010	12:01:00 PM	Helium valve closed
5/22/2010	12:01:00 PM	PH3 valve closed
5/22/2010	12:01:00 PM	Main Vac valve closed
5/22/2010	12:01:00 PM	Bypass valve closed
5/22/2010	12:01:00 PM	H2 valve opened
5/22/2010	12:01:00 PM	BCl3 valve opened
5/22/2010	12:01:00 PM	SiCl4 pre valve opened
5/22/2010	12:01:00 PM	SiCl4 post valve opened
5/22/2010	12:01:00 PM	Bubbler valve opened
5/22/2010	12:01:00 PM	Helium MFC set to  0.000000
5/22/2010	12:01:00 PM	H2 MFC set to  500.000000
5/22/2010	12:01:00 PM	BCl3 MFC set to  35.000000
5/22/2010	12:01:00 PM	SiCl4 MFC set to  350.000000
5/22/2010	12:01:00 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	12:01:01 PM	Tube furnace set to 1000
5/22/2010	12:16:01 PM	H2 valve closed
5/22/2010	12:16:01 PM	BCl3 valve closed
5/22/2010	12:16:01 PM	PH3 valve closed
5/22/2010	12:16:01 PM	SiCl4 pre valve closed
5/22/2010	12:16:01 PM	SiCl4 post valve closed
5/22/2010	12:16:01 PM	Main Vac valve closed
5/22/2010	12:16:01 PM	Bypass valve closed
5/22/2010	12:16:01 PM	Helium valve opened
5/22/2010	12:16:01 PM	Bubbler valve opened
5/22/2010	12:16:01 PM	Helium MFC set to  500.000000
5/22/2010	12:16:01 PM	H2 MFC set to  0.000000
5/22/2010	12:16:01 PM	BCl3 MFC set to  0.000000
5/22/2010	12:16:01 PM	SiCl4 MFC set to  0.000000
5/22/2010	12:16:01 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	12:16:01 PM	Tube furnace set to 0
5/22/2010	12:36:01 PM	Helium valve closed
5/22/2010	12:36:01 PM	H2 valve closed
5/22/2010	12:36:01 PM	BCl3 valve closed
5/22/2010	12:36:01 PM	PH3 valve closed
5/22/2010	12:36:01 PM	SiCl4 pre valve closed
5/22/2010	12:36:01 PM	SiCl4 post valve closed
5/22/2010	12:36:01 PM	Main Vac valve closed
5/22/2010	12:36:01 PM	Bypass valve closed
5/22/2010	12:36:01 PM	Bubbler valve closed
5/22/2010	12:36:01 PM	Helium MFC set to  0.000000
5/22/2010	12:36:01 PM	H2 MFC set to  0.000000
5/22/2010	12:36:01 PM	BCl3 MFC set to  0.000000
5/22/2010	12:36:01 PM	SiCl4 MFC set to  0.000000
5/22/2010	12:36:01 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	12:36:01 PM	Tube furnace set to 0
5/22/2010	12:36:01 PM	Run finished at 12:36 PM
5/22/2010	12:45:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	12:45:44 PM	Recipe started at 12:45 PM
5/22/2010	12:45:44 PM	H2 valve closed
5/22/2010	12:45:44 PM	BCl3 valve closed
5/22/2010	12:45:44 PM	PH3 valve closed
5/22/2010	12:45:44 PM	SiCl4 pre valve closed
5/22/2010	12:45:44 PM	SiCl4 post valve closed
5/22/2010	12:45:44 PM	Main Vac valve closed
5/22/2010	12:45:44 PM	Bypass valve closed
5/22/2010	12:45:44 PM	Bubbler valve closed
5/22/2010	12:45:44 PM	Helium valve opened
5/22/2010	12:45:44 PM	Helium MFC set to  500.000000
5/22/2010	12:45:44 PM	H2 MFC set to  0.000000
5/22/2010	12:45:44 PM	BCl3 MFC set to  0.000000
5/22/2010	12:45:44 PM	SiCl4 MFC set to  0.000000
5/22/2010	12:45:44 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	12:45:45 PM	Tube furnace set to 0
5/22/2010	12:45:49 PM	Helium valve closed
5/22/2010	12:45:49 PM	H2 valve closed
5/22/2010	12:45:49 PM	BCl3 valve closed
5/22/2010	12:45:49 PM	PH3 valve closed
5/22/2010	12:45:49 PM	SiCl4 pre valve closed
5/22/2010	12:45:49 PM	SiCl4 post valve closed
5/22/2010	12:45:49 PM	Main Vac valve closed
5/22/2010	12:45:49 PM	Bypass valve closed
5/22/2010	12:45:49 PM	Bubbler valve closed
5/22/2010	12:45:49 PM	Helium MFC set to  0.000000
5/22/2010	12:45:49 PM	H2 MFC set to  0.000000
5/22/2010	12:45:50 PM	BCl3 MFC set to  0.000000
5/22/2010	12:45:50 PM	SiCl4 MFC set to  0.000000
5/22/2010	12:45:50 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	12:45:50 PM	Tube furnace set to 0
5/22/2010	12:45:50 PM	Run finished at 12:45 PM
5/22/2010	12:45:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	1:00:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	1:00:29 PM	Recipe started at 1:00 PM
5/22/2010	1:00:29 PM	Helium valve closed
5/22/2010	1:00:29 PM	H2 valve closed
5/22/2010	1:00:29 PM	BCl3 valve closed
5/22/2010	1:00:29 PM	PH3 valve closed
5/22/2010	1:00:29 PM	SiCl4 pre valve closed
5/22/2010	1:00:29 PM	SiCl4 post valve closed
5/22/2010	1:00:29 PM	Main Vac valve closed
5/22/2010	1:00:29 PM	Bubbler valve closed
5/22/2010	1:00:29 PM	Bypass valve opened
5/22/2010	1:00:29 PM	Helium MFC set to  0.000000
5/22/2010	1:00:29 PM	H2 MFC set to  0.000000
5/22/2010	1:00:29 PM	BCl3 MFC set to  0.000000
5/22/2010	1:00:29 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:00:29 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:00:29 PM	Tube furnace set to 0
5/22/2010	1:01:16 PM	Helium valve closed
5/22/2010	1:01:16 PM	H2 valve closed
5/22/2010	1:01:16 PM	BCl3 valve closed
5/22/2010	1:01:16 PM	PH3 valve closed
5/22/2010	1:01:16 PM	SiCl4 pre valve closed
5/22/2010	1:01:16 PM	SiCl4 post valve closed
5/22/2010	1:01:16 PM	Bubbler valve closed
5/22/2010	1:01:16 PM	Main Vac valve opened
5/22/2010	1:01:16 PM	Bypass valve opened
5/22/2010	1:01:16 PM	Helium MFC set to  0.000000
5/22/2010	1:01:16 PM	H2 MFC set to  0.000000
5/22/2010	1:01:16 PM	BCl3 MFC set to  0.000000
5/22/2010	1:01:16 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:01:16 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:01:16 PM	Tube furnace set to 0
5/22/2010	1:01:16 PM	Run finished at 1:01 PM
5/22/2010	1:01:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	1:01:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	1:01:56 PM	Recipe started at 1:01 PM
5/22/2010	1:01:56 PM	H2 valve closed
5/22/2010	1:01:56 PM	BCl3 valve closed
5/22/2010	1:01:56 PM	PH3 valve closed
5/22/2010	1:01:56 PM	SiCl4 pre valve closed
5/22/2010	1:01:56 PM	SiCl4 post valve closed
5/22/2010	1:01:56 PM	Main Vac valve closed
5/22/2010	1:01:56 PM	Bypass valve closed
5/22/2010	1:01:56 PM	Bubbler valve closed
5/22/2010	1:01:56 PM	Helium valve opened
5/22/2010	1:01:56 PM	Helium MFC set to  500.000000
5/22/2010	1:01:56 PM	H2 MFC set to  0.000000
5/22/2010	1:01:56 PM	BCl3 MFC set to  0.000000
5/22/2010	1:01:56 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:01:56 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:01:57 PM	Tube furnace set to 0
5/22/2010	1:03:16 PM	Helium valve closed
5/22/2010	1:03:16 PM	H2 valve closed
5/22/2010	1:03:16 PM	BCl3 valve closed
5/22/2010	1:03:16 PM	PH3 valve closed
5/22/2010	1:03:16 PM	SiCl4 pre valve closed
5/22/2010	1:03:16 PM	SiCl4 post valve closed
5/22/2010	1:03:16 PM	Main Vac valve closed
5/22/2010	1:03:16 PM	Bypass valve closed
5/22/2010	1:03:16 PM	Bubbler valve closed
5/22/2010	1:03:16 PM	Helium MFC set to  0.000000
5/22/2010	1:03:16 PM	H2 MFC set to  0.000000
5/22/2010	1:03:16 PM	BCl3 MFC set to  0.000000
5/22/2010	1:03:16 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:03:16 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:03:17 PM	Tube furnace set to 0
5/22/2010	1:03:32 PM	Helium valve closed
5/22/2010	1:03:32 PM	H2 valve closed
5/22/2010	1:03:32 PM	BCl3 valve closed
5/22/2010	1:03:32 PM	PH3 valve closed
5/22/2010	1:03:32 PM	SiCl4 pre valve closed
5/22/2010	1:03:32 PM	SiCl4 post valve closed
5/22/2010	1:03:32 PM	Main Vac valve closed
5/22/2010	1:03:32 PM	Bubbler valve closed
5/22/2010	1:03:32 PM	Bypass valve opened
5/22/2010	1:03:32 PM	Helium MFC set to  0.000000
5/22/2010	1:03:32 PM	H2 MFC set to  0.000000
5/22/2010	1:03:32 PM	BCl3 MFC set to  0.000000
5/22/2010	1:03:32 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:03:32 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:03:32 PM	Tube furnace set to 0
5/22/2010	1:04:04 PM	Helium valve closed
5/22/2010	1:04:04 PM	H2 valve closed
5/22/2010	1:04:04 PM	BCl3 valve closed
5/22/2010	1:04:04 PM	PH3 valve closed
5/22/2010	1:04:04 PM	SiCl4 pre valve closed
5/22/2010	1:04:04 PM	SiCl4 post valve closed
5/22/2010	1:04:04 PM	Bubbler valve closed
5/22/2010	1:04:04 PM	Main Vac valve opened
5/22/2010	1:04:04 PM	Bypass valve opened
5/22/2010	1:04:04 PM	Helium MFC set to  0.000000
5/22/2010	1:04:04 PM	H2 MFC set to  0.000000
5/22/2010	1:04:04 PM	BCl3 MFC set to  0.000000
5/22/2010	1:04:04 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:04:04 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:04:04 PM	Tube furnace set to 0
5/22/2010	1:09:04 PM	H2 valve closed
5/22/2010	1:09:04 PM	BCl3 valve closed
5/22/2010	1:09:04 PM	PH3 valve closed
5/22/2010	1:09:04 PM	SiCl4 pre valve closed
5/22/2010	1:09:04 PM	SiCl4 post valve closed
5/22/2010	1:09:04 PM	Main Vac valve closed
5/22/2010	1:09:04 PM	Bypass valve closed
5/22/2010	1:09:04 PM	Bubbler valve closed
5/22/2010	1:09:04 PM	Helium valve opened
5/22/2010	1:09:04 PM	Helium MFC set to  500.000000
5/22/2010	1:09:04 PM	H2 MFC set to  0.000000
5/22/2010	1:09:04 PM	BCl3 MFC set to  0.000000
5/22/2010	1:09:04 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:09:04 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:09:04 PM	Tube furnace set to 0
5/22/2010	1:10:23 PM	Helium valve closed
5/22/2010	1:10:23 PM	H2 valve closed
5/22/2010	1:10:23 PM	BCl3 valve closed
5/22/2010	1:10:23 PM	PH3 valve closed
5/22/2010	1:10:23 PM	SiCl4 pre valve closed
5/22/2010	1:10:23 PM	SiCl4 post valve closed
5/22/2010	1:10:23 PM	Main Vac valve closed
5/22/2010	1:10:23 PM	Bypass valve closed
5/22/2010	1:10:23 PM	Bubbler valve closed
5/22/2010	1:10:23 PM	Helium MFC set to  0.000000
5/22/2010	1:10:23 PM	H2 MFC set to  0.000000
5/22/2010	1:10:23 PM	BCl3 MFC set to  0.000000
5/22/2010	1:10:23 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:10:23 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:10:23 PM	Tube furnace set to 0
5/22/2010	1:10:38 PM	Helium valve closed
5/22/2010	1:10:38 PM	H2 valve closed
5/22/2010	1:10:38 PM	BCl3 valve closed
5/22/2010	1:10:38 PM	PH3 valve closed
5/22/2010	1:10:38 PM	SiCl4 pre valve closed
5/22/2010	1:10:38 PM	SiCl4 post valve closed
5/22/2010	1:10:38 PM	Main Vac valve closed
5/22/2010	1:10:38 PM	Bubbler valve closed
5/22/2010	1:10:38 PM	Bypass valve opened
5/22/2010	1:10:38 PM	Helium MFC set to  0.000000
5/22/2010	1:10:38 PM	H2 MFC set to  0.000000
5/22/2010	1:10:38 PM	BCl3 MFC set to  0.000000
5/22/2010	1:10:38 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:10:38 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:10:38 PM	Tube furnace set to 0
5/22/2010	1:11:09 PM	Helium valve closed
5/22/2010	1:11:09 PM	H2 valve closed
5/22/2010	1:11:09 PM	BCl3 valve closed
5/22/2010	1:11:09 PM	PH3 valve closed
5/22/2010	1:11:09 PM	SiCl4 pre valve closed
5/22/2010	1:11:09 PM	SiCl4 post valve closed
5/22/2010	1:11:09 PM	Bubbler valve closed
5/22/2010	1:11:09 PM	Main Vac valve opened
5/22/2010	1:11:09 PM	Bypass valve opened
5/22/2010	1:11:09 PM	Helium MFC set to  0.000000
5/22/2010	1:11:09 PM	H2 MFC set to  0.000000
5/22/2010	1:11:09 PM	BCl3 MFC set to  0.000000
5/22/2010	1:11:09 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:11:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:11:10 PM	Tube furnace set to 0
5/22/2010	1:16:10 PM	H2 valve closed
5/22/2010	1:16:10 PM	BCl3 valve closed
5/22/2010	1:16:10 PM	PH3 valve closed
5/22/2010	1:16:10 PM	SiCl4 pre valve closed
5/22/2010	1:16:10 PM	SiCl4 post valve closed
5/22/2010	1:16:10 PM	Main Vac valve closed
5/22/2010	1:16:10 PM	Bypass valve closed
5/22/2010	1:16:10 PM	Bubbler valve closed
5/22/2010	1:16:10 PM	Helium valve opened
5/22/2010	1:16:10 PM	Helium MFC set to  500.000000
5/22/2010	1:16:10 PM	H2 MFC set to  0.000000
5/22/2010	1:16:10 PM	BCl3 MFC set to  0.000000
5/22/2010	1:16:10 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:16:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:16:10 PM	Tube furnace set to 0
5/22/2010	1:17:28 PM	Helium valve closed
5/22/2010	1:17:28 PM	H2 valve closed
5/22/2010	1:17:28 PM	BCl3 valve closed
5/22/2010	1:17:28 PM	PH3 valve closed
5/22/2010	1:17:28 PM	SiCl4 pre valve closed
5/22/2010	1:17:28 PM	SiCl4 post valve closed
5/22/2010	1:17:28 PM	Main Vac valve closed
5/22/2010	1:17:28 PM	Bypass valve closed
5/22/2010	1:17:28 PM	Bubbler valve closed
5/22/2010	1:17:28 PM	Helium MFC set to  0.000000
5/22/2010	1:17:28 PM	H2 MFC set to  0.000000
5/22/2010	1:17:28 PM	BCl3 MFC set to  0.000000
5/22/2010	1:17:28 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:17:28 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:17:28 PM	Tube furnace set to 0
5/22/2010	1:17:44 PM	Helium valve closed
5/22/2010	1:17:44 PM	H2 valve closed
5/22/2010	1:17:44 PM	BCl3 valve closed
5/22/2010	1:17:44 PM	PH3 valve closed
5/22/2010	1:17:44 PM	SiCl4 pre valve closed
5/22/2010	1:17:44 PM	SiCl4 post valve closed
5/22/2010	1:17:44 PM	Main Vac valve closed
5/22/2010	1:17:44 PM	Bubbler valve closed
5/22/2010	1:17:44 PM	Bypass valve opened
5/22/2010	1:17:44 PM	Helium MFC set to  0.000000
5/22/2010	1:17:44 PM	H2 MFC set to  0.000000
5/22/2010	1:17:44 PM	BCl3 MFC set to  0.000000
5/22/2010	1:17:44 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:17:44 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:17:44 PM	Tube furnace set to 0
5/22/2010	1:18:15 PM	Helium valve closed
5/22/2010	1:18:15 PM	H2 valve closed
5/22/2010	1:18:15 PM	BCl3 valve closed
5/22/2010	1:18:15 PM	PH3 valve closed
5/22/2010	1:18:15 PM	SiCl4 pre valve closed
5/22/2010	1:18:15 PM	SiCl4 post valve closed
5/22/2010	1:18:15 PM	Bubbler valve closed
5/22/2010	1:18:15 PM	Main Vac valve opened
5/22/2010	1:18:15 PM	Bypass valve opened
5/22/2010	1:18:15 PM	Helium MFC set to  0.000000
5/22/2010	1:18:15 PM	H2 MFC set to  0.000000
5/22/2010	1:18:15 PM	BCl3 MFC set to  0.000000
5/22/2010	1:18:15 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:18:15 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:18:15 PM	Tube furnace set to 0
5/22/2010	1:23:15 PM	Helium valve closed
5/22/2010	1:23:15 PM	H2 valve closed
5/22/2010	1:23:15 PM	BCl3 valve closed
5/22/2010	1:23:15 PM	PH3 valve closed
5/22/2010	1:23:15 PM	SiCl4 pre valve closed
5/22/2010	1:23:15 PM	SiCl4 post valve closed
5/22/2010	1:23:15 PM	Bubbler valve closed
5/22/2010	1:23:15 PM	Main Vac valve opened
5/22/2010	1:23:15 PM	Bypass valve opened
5/22/2010	1:23:15 PM	Helium MFC set to  0.000000
5/22/2010	1:23:15 PM	H2 MFC set to  0.000000
5/22/2010	1:23:15 PM	BCl3 MFC set to  0.000000
5/22/2010	1:23:15 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:23:15 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:23:15 PM	Tube furnace set to 0
5/22/2010	1:23:16 PM	Run finished at 1:23 PM
5/22/2010	1:23:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	1:27:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	1:27:55 PM	Recipe started at 1:27 PM
5/22/2010	1:27:55 PM	Helium valve closed
5/22/2010	1:27:55 PM	H2 valve closed
5/22/2010	1:27:55 PM	BCl3 valve closed
5/22/2010	1:27:55 PM	PH3 valve closed
5/22/2010	1:27:55 PM	SiCl4 pre valve closed
5/22/2010	1:27:55 PM	SiCl4 post valve closed
5/22/2010	1:27:55 PM	Main Vac valve closed
5/22/2010	1:27:55 PM	Bypass valve closed
5/22/2010	1:27:55 PM	Bubbler valve closed
5/22/2010	1:27:55 PM	Helium MFC set to  0.000000
5/22/2010	1:27:55 PM	H2 MFC set to  0.000000
5/22/2010	1:27:55 PM	BCl3 MFC set to  0.000000
5/22/2010	1:27:55 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:27:55 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:27:55 PM	Tube furnace set to 0
5/22/2010	1:27:56 PM	Run finished at 1:27 PM
5/22/2010	1:27:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	1:28:43 PM	Recipe started at 1:28 PM
5/22/2010	1:28:43 PM	Helium valve closed
5/22/2010	1:28:43 PM	BCl3 valve closed
5/22/2010	1:28:43 PM	PH3 valve closed
5/22/2010	1:28:43 PM	SiCl4 pre valve closed
5/22/2010	1:28:43 PM	SiCl4 post valve closed
5/22/2010	1:28:43 PM	Main Vac valve closed
5/22/2010	1:28:43 PM	Bypass valve closed
5/22/2010	1:28:43 PM	Bubbler valve closed
5/22/2010	1:28:43 PM	H2 valve opened
5/22/2010	1:28:43 PM	Helium MFC set to  0.000000
5/22/2010	1:28:43 PM	H2 MFC set to  500.000000
5/22/2010	1:28:43 PM	BCl3 MFC set to  0.000000
5/22/2010	1:28:43 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:28:43 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:28:43 PM	Tube furnace set to 0
5/22/2010	1:30:01 PM	Helium valve closed
5/22/2010	1:30:01 PM	BCl3 valve closed
5/22/2010	1:30:01 PM	PH3 valve closed
5/22/2010	1:30:01 PM	SiCl4 pre valve closed
5/22/2010	1:30:01 PM	SiCl4 post valve closed
5/22/2010	1:30:01 PM	Main Vac valve closed
5/22/2010	1:30:01 PM	Bypass valve closed
5/22/2010	1:30:01 PM	H2 valve opened
5/22/2010	1:30:01 PM	Bubbler valve opened
5/22/2010	1:30:01 PM	Helium MFC set to  0.000000
5/22/2010	1:30:01 PM	H2 MFC set to  500.000000
5/22/2010	1:30:01 PM	BCl3 MFC set to  0.000000
5/22/2010	1:30:01 PM	SiCl4 MFC set to  0.000000
5/22/2010	1:30:01 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:30:02 PM	Tube furnace set to 1000
5/22/2010	1:50:02 PM	Helium valve closed
5/22/2010	1:50:02 PM	PH3 valve closed
5/22/2010	1:50:02 PM	Main Vac valve closed
5/22/2010	1:50:02 PM	Bypass valve closed
5/22/2010	1:50:02 PM	H2 valve opened
5/22/2010	1:50:02 PM	BCl3 valve opened
5/22/2010	1:50:02 PM	SiCl4 pre valve opened
5/22/2010	1:50:02 PM	SiCl4 post valve opened
5/22/2010	1:50:02 PM	Bubbler valve opened
5/22/2010	1:50:02 PM	Helium MFC set to  0.000000
5/22/2010	1:50:02 PM	H2 MFC set to  500.000000
5/22/2010	1:50:02 PM	BCl3 MFC set to  35.000000
5/22/2010	1:50:02 PM	SiCl4 MFC set to  350.000000
5/22/2010	1:50:02 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	1:50:02 PM	Tube furnace set to 1000
5/22/2010	2:05:02 PM	H2 valve closed
5/22/2010	2:05:02 PM	BCl3 valve closed
5/22/2010	2:05:02 PM	PH3 valve closed
5/22/2010	2:05:02 PM	SiCl4 pre valve closed
5/22/2010	2:05:02 PM	SiCl4 post valve closed
5/22/2010	2:05:02 PM	Main Vac valve closed
5/22/2010	2:05:02 PM	Bypass valve closed
5/22/2010	2:05:02 PM	Helium valve opened
5/22/2010	2:05:02 PM	Bubbler valve opened
5/22/2010	2:05:02 PM	Helium MFC set to  500.000000
5/22/2010	2:05:02 PM	H2 MFC set to  0.000000
5/22/2010	2:05:02 PM	BCl3 MFC set to  0.000000
5/22/2010	2:05:02 PM	SiCl4 MFC set to  0.000000
5/22/2010	2:05:02 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	2:05:02 PM	Tube furnace set to 0
5/22/2010	2:25:02 PM	Helium valve closed
5/22/2010	2:25:02 PM	H2 valve closed
5/22/2010	2:25:02 PM	BCl3 valve closed
5/22/2010	2:25:02 PM	PH3 valve closed
5/22/2010	2:25:02 PM	SiCl4 pre valve closed
5/22/2010	2:25:02 PM	SiCl4 post valve closed
5/22/2010	2:25:02 PM	Main Vac valve closed
5/22/2010	2:25:02 PM	Bypass valve closed
5/22/2010	2:25:02 PM	Bubbler valve closed
5/22/2010	2:25:02 PM	Helium MFC set to  0.000000
5/22/2010	2:25:02 PM	H2 MFC set to  0.000000
5/22/2010	2:25:02 PM	BCl3 MFC set to  0.000000
5/22/2010	2:25:02 PM	SiCl4 MFC set to  0.000000
5/22/2010	2:25:02 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	2:25:02 PM	Tube furnace set to 0
5/22/2010	2:25:02 PM	Run finished at 2:25 PM
5/22/2010	2:38:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	2:38:42 PM	Recipe started at 2:38 PM
5/22/2010	2:38:42 PM	H2 valve closed
5/22/2010	2:38:42 PM	BCl3 valve closed
5/22/2010	2:38:42 PM	PH3 valve closed
5/22/2010	2:38:42 PM	SiCl4 pre valve closed
5/22/2010	2:38:42 PM	SiCl4 post valve closed
5/22/2010	2:38:42 PM	Main Vac valve closed
5/22/2010	2:38:42 PM	Bypass valve closed
5/22/2010	2:38:42 PM	Bubbler valve closed
5/22/2010	2:38:42 PM	Helium valve opened
5/22/2010	2:38:42 PM	Helium MFC set to  500.000000
5/22/2010	2:38:42 PM	H2 MFC set to  0.000000
5/22/2010	2:38:42 PM	BCl3 MFC set to  0.000000
5/22/2010	2:38:42 PM	SiCl4 MFC set to  0.000000
5/22/2010	2:38:42 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	2:38:43 PM	Tube furnace set to 0
5/22/2010	2:38:47 PM	Helium valve closed
5/22/2010	2:38:47 PM	H2 valve closed
5/22/2010	2:38:47 PM	BCl3 valve closed
5/22/2010	2:38:47 PM	PH3 valve closed
5/22/2010	2:38:47 PM	SiCl4 pre valve closed
5/22/2010	2:38:47 PM	SiCl4 post valve closed
5/22/2010	2:38:47 PM	Main Vac valve closed
5/22/2010	2:38:47 PM	Bypass valve closed
5/22/2010	2:38:47 PM	Bubbler valve closed
5/22/2010	2:38:47 PM	Helium MFC set to  0.000000
5/22/2010	2:38:47 PM	H2 MFC set to  0.000000
5/22/2010	2:38:47 PM	BCl3 MFC set to  0.000000
5/22/2010	2:38:47 PM	SiCl4 MFC set to  0.000000
5/22/2010	2:38:47 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	2:38:47 PM	Tube furnace set to 0
5/22/2010	2:38:47 PM	Run finished at 2:38 PM
5/22/2010	2:38:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	2:42:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	2:42:48 PM	Recipe started at 2:42 PM
5/22/2010	2:42:48 PM	Helium valve closed
5/22/2010	2:42:48 PM	H2 valve closed
5/22/2010	2:42:48 PM	BCl3 valve closed
5/22/2010	2:42:48 PM	PH3 valve closed
5/22/2010	2:42:48 PM	SiCl4 pre valve closed
5/22/2010	2:42:48 PM	SiCl4 post valve closed
5/22/2010	2:42:48 PM	Main Vac valve closed
5/22/2010	2:42:48 PM	Bubbler valve closed
5/22/2010	2:42:48 PM	Bypass valve opened
5/22/2010	2:42:48 PM	Helium MFC set to  0.000000
5/22/2010	2:42:48 PM	H2 MFC set to  0.000000
5/22/2010	2:42:48 PM	BCl3 MFC set to  0.000000
5/22/2010	2:42:48 PM	SiCl4 MFC set to  0.000000
5/22/2010	2:42:48 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	2:42:48 PM	Tube furnace set to 0
5/22/2010	2:43:34 PM	Helium valve closed
5/22/2010	2:43:34 PM	H2 valve closed
5/22/2010	2:43:34 PM	BCl3 valve closed
5/22/2010	2:43:34 PM	PH3 valve closed
5/22/2010	2:43:34 PM	SiCl4 pre valve closed
5/22/2010	2:43:34 PM	SiCl4 post valve closed
5/22/2010	2:43:34 PM	Bubbler valve closed
5/22/2010	2:43:34 PM	Main Vac valve opened
5/22/2010	2:43:34 PM	Bypass valve opened
5/22/2010	2:43:34 PM	Helium MFC set to  0.000000
5/22/2010	2:43:34 PM	H2 MFC set to  0.000000
5/22/2010	2:43:34 PM	BCl3 MFC set to  0.000000
5/22/2010	2:43:34 PM	SiCl4 MFC set to  0.000000
5/22/2010	2:43:34 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	2:43:35 PM	Tube furnace set to 0
5/22/2010	2:43:35 PM	Run finished at 2:43 PM
5/22/2010	2:43:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	2:44:05 PM	BCl3 valve opened
5/22/2010	2:44:28 PM	BCl3 MFC set to  100.000000
5/22/2010	2:46:41 PM	BCl3 MFC set to  100.000000
5/22/2010	3:39:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	3:39:26 PM	Recipe started at 3:39 PM
5/22/2010	3:39:26 PM	Helium valve closed
5/22/2010	3:39:26 PM	H2 valve closed
5/22/2010	3:39:26 PM	BCl3 valve closed
5/22/2010	3:39:26 PM	PH3 valve closed
5/22/2010	3:39:26 PM	SiCl4 pre valve closed
5/22/2010	3:39:26 PM	SiCl4 post valve closed
5/22/2010	3:39:26 PM	Main Vac valve closed
5/22/2010	3:39:26 PM	Bypass valve closed
5/22/2010	3:39:26 PM	Bubbler valve closed
5/22/2010	3:39:26 PM	Helium MFC set to  0.000000
5/22/2010	3:39:26 PM	H2 MFC set to  0.000000
5/22/2010	3:39:26 PM	BCl3 MFC set to  0.000000
5/22/2010	3:39:26 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:39:26 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:39:26 PM	Tube furnace set to 0
5/22/2010	3:39:27 PM	Run finished at 3:39 PM
5/22/2010	3:39:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	3:39:30 PM	BCl3 valve opened
5/22/2010	3:39:34 PM	BCl3 MFC set to  100.000000
5/22/2010	3:39:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	3:39:46 PM	Recipe started at 3:39 PM
5/22/2010	3:39:46 PM	Helium valve closed
5/22/2010	3:39:46 PM	H2 valve closed
5/22/2010	3:39:46 PM	BCl3 valve closed
5/22/2010	3:39:46 PM	PH3 valve closed
5/22/2010	3:39:46 PM	SiCl4 pre valve closed
5/22/2010	3:39:46 PM	SiCl4 post valve closed
5/22/2010	3:39:46 PM	Main Vac valve closed
5/22/2010	3:39:46 PM	Bubbler valve closed
5/22/2010	3:39:46 PM	Bypass valve opened
5/22/2010	3:39:46 PM	Helium MFC set to  0.000000
5/22/2010	3:39:46 PM	H2 MFC set to  0.000000
5/22/2010	3:39:46 PM	BCl3 MFC set to  0.000000
5/22/2010	3:39:46 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:39:46 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:39:46 PM	Tube furnace set to 0
5/22/2010	3:39:46 PM	Helium valve closed
5/22/2010	3:39:46 PM	H2 valve closed
5/22/2010	3:39:46 PM	BCl3 valve closed
5/22/2010	3:39:46 PM	PH3 valve closed
5/22/2010	3:39:46 PM	SiCl4 pre valve closed
5/22/2010	3:39:46 PM	SiCl4 post valve closed
5/22/2010	3:39:46 PM	Bubbler valve closed
5/22/2010	3:39:46 PM	Main Vac valve opened
5/22/2010	3:39:46 PM	Bypass valve opened
5/22/2010	3:39:46 PM	Helium MFC set to  0.000000
5/22/2010	3:39:46 PM	H2 MFC set to  0.000000
5/22/2010	3:39:46 PM	BCl3 MFC set to  0.000000
5/22/2010	3:39:46 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:39:46 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:39:46 PM	Tube furnace set to 0
5/22/2010	3:39:47 PM	Run finished at 3:39 PM
5/22/2010	3:39:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	3:39:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	3:39:52 PM	Recipe started at 3:39 PM
5/22/2010	3:39:52 PM	H2 valve closed
5/22/2010	3:39:52 PM	BCl3 valve closed
5/22/2010	3:39:52 PM	PH3 valve closed
5/22/2010	3:39:52 PM	SiCl4 pre valve closed
5/22/2010	3:39:52 PM	SiCl4 post valve closed
5/22/2010	3:39:52 PM	Main Vac valve closed
5/22/2010	3:39:52 PM	Bypass valve closed
5/22/2010	3:39:52 PM	Bubbler valve closed
5/22/2010	3:39:52 PM	Helium valve opened
5/22/2010	3:39:52 PM	Helium MFC set to  500.000000
5/22/2010	3:39:52 PM	H2 MFC set to  0.000000
5/22/2010	3:39:52 PM	BCl3 MFC set to  0.000000
5/22/2010	3:39:52 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:39:52 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:39:52 PM	Tube furnace set to 0
5/22/2010	3:41:07 PM	Helium valve closed
5/22/2010	3:41:07 PM	H2 valve closed
5/22/2010	3:41:07 PM	BCl3 valve closed
5/22/2010	3:41:07 PM	PH3 valve closed
5/22/2010	3:41:07 PM	SiCl4 pre valve closed
5/22/2010	3:41:07 PM	SiCl4 post valve closed
5/22/2010	3:41:07 PM	Main Vac valve closed
5/22/2010	3:41:07 PM	Bypass valve closed
5/22/2010	3:41:07 PM	Bubbler valve closed
5/22/2010	3:41:07 PM	Helium MFC set to  0.000000
5/22/2010	3:41:08 PM	H2 MFC set to  0.000000
5/22/2010	3:41:08 PM	BCl3 MFC set to  0.000000
5/22/2010	3:41:08 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:41:08 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:41:08 PM	Tube furnace set to 0
5/22/2010	3:41:08 PM	Run finished at 3:41 PM
5/22/2010	3:41:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	3:44:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	3:44:27 PM	Recipe started at 3:44 PM
5/22/2010	3:44:27 PM	Helium valve closed
5/22/2010	3:44:27 PM	H2 valve closed
5/22/2010	3:44:27 PM	BCl3 valve closed
5/22/2010	3:44:27 PM	PH3 valve closed
5/22/2010	3:44:27 PM	SiCl4 pre valve closed
5/22/2010	3:44:27 PM	SiCl4 post valve closed
5/22/2010	3:44:27 PM	Main Vac valve closed
5/22/2010	3:44:27 PM	Bubbler valve closed
5/22/2010	3:44:27 PM	Bypass valve opened
5/22/2010	3:44:27 PM	Helium MFC set to  0.000000
5/22/2010	3:44:27 PM	H2 MFC set to  0.000000
5/22/2010	3:44:27 PM	BCl3 MFC set to  0.000000
5/22/2010	3:44:27 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:44:27 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:44:27 PM	Tube furnace set to 0
5/22/2010	3:45:11 PM	Helium valve closed
5/22/2010	3:45:11 PM	H2 valve closed
5/22/2010	3:45:11 PM	BCl3 valve closed
5/22/2010	3:45:11 PM	PH3 valve closed
5/22/2010	3:45:11 PM	SiCl4 pre valve closed
5/22/2010	3:45:11 PM	SiCl4 post valve closed
5/22/2010	3:45:11 PM	Bubbler valve closed
5/22/2010	3:45:11 PM	Main Vac valve opened
5/22/2010	3:45:11 PM	Bypass valve opened
5/22/2010	3:45:11 PM	Helium MFC set to  0.000000
5/22/2010	3:45:11 PM	H2 MFC set to  0.000000
5/22/2010	3:45:11 PM	BCl3 MFC set to  0.000000
5/22/2010	3:45:11 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:45:11 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:45:11 PM	Tube furnace set to 0
5/22/2010	3:45:11 PM	Run finished at 3:45 PM
5/22/2010	3:45:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	3:46:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	3:46:15 PM	Recipe started at 3:46 PM
5/22/2010	3:46:15 PM	H2 valve closed
5/22/2010	3:46:15 PM	BCl3 valve closed
5/22/2010	3:46:15 PM	PH3 valve closed
5/22/2010	3:46:15 PM	SiCl4 pre valve closed
5/22/2010	3:46:15 PM	SiCl4 post valve closed
5/22/2010	3:46:15 PM	Main Vac valve closed
5/22/2010	3:46:15 PM	Bypass valve closed
5/22/2010	3:46:15 PM	Bubbler valve closed
5/22/2010	3:46:15 PM	Helium valve opened
5/22/2010	3:46:15 PM	Helium MFC set to  500.000000
5/22/2010	3:46:15 PM	H2 MFC set to  0.000000
5/22/2010	3:46:15 PM	BCl3 MFC set to  0.000000
5/22/2010	3:46:15 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:46:15 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:46:15 PM	Tube furnace set to 0
5/22/2010	3:47:35 PM	Helium valve closed
5/22/2010	3:47:35 PM	H2 valve closed
5/22/2010	3:47:35 PM	BCl3 valve closed
5/22/2010	3:47:35 PM	PH3 valve closed
5/22/2010	3:47:35 PM	SiCl4 pre valve closed
5/22/2010	3:47:35 PM	SiCl4 post valve closed
5/22/2010	3:47:35 PM	Main Vac valve closed
5/22/2010	3:47:35 PM	Bypass valve closed
5/22/2010	3:47:35 PM	Bubbler valve closed
5/22/2010	3:47:35 PM	Helium MFC set to  0.000000
5/22/2010	3:47:35 PM	H2 MFC set to  0.000000
5/22/2010	3:47:35 PM	BCl3 MFC set to  0.000000
5/22/2010	3:47:35 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:47:35 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:47:36 PM	Tube furnace set to 0
5/22/2010	3:47:51 PM	Helium valve closed
5/22/2010	3:47:51 PM	H2 valve closed
5/22/2010	3:47:51 PM	BCl3 valve closed
5/22/2010	3:47:51 PM	PH3 valve closed
5/22/2010	3:47:51 PM	SiCl4 pre valve closed
5/22/2010	3:47:51 PM	SiCl4 post valve closed
5/22/2010	3:47:51 PM	Main Vac valve closed
5/22/2010	3:47:51 PM	Bubbler valve closed
5/22/2010	3:47:51 PM	Bypass valve opened
5/22/2010	3:47:51 PM	Helium MFC set to  0.000000
5/22/2010	3:47:51 PM	H2 MFC set to  0.000000
5/22/2010	3:47:51 PM	BCl3 MFC set to  0.000000
5/22/2010	3:47:51 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:47:51 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:47:51 PM	Tube furnace set to 0
5/22/2010	3:48:23 PM	Helium valve closed
5/22/2010	3:48:23 PM	H2 valve closed
5/22/2010	3:48:23 PM	BCl3 valve closed
5/22/2010	3:48:23 PM	PH3 valve closed
5/22/2010	3:48:23 PM	SiCl4 pre valve closed
5/22/2010	3:48:23 PM	SiCl4 post valve closed
5/22/2010	3:48:23 PM	Bubbler valve closed
5/22/2010	3:48:23 PM	Main Vac valve opened
5/22/2010	3:48:23 PM	Bypass valve opened
5/22/2010	3:48:23 PM	Helium MFC set to  0.000000
5/22/2010	3:48:23 PM	H2 MFC set to  0.000000
5/22/2010	3:48:23 PM	BCl3 MFC set to  0.000000
5/22/2010	3:48:23 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:48:23 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:48:23 PM	Tube furnace set to 0
5/22/2010	3:53:23 PM	H2 valve closed
5/22/2010	3:53:23 PM	BCl3 valve closed
5/22/2010	3:53:23 PM	PH3 valve closed
5/22/2010	3:53:23 PM	SiCl4 pre valve closed
5/22/2010	3:53:23 PM	SiCl4 post valve closed
5/22/2010	3:53:23 PM	Main Vac valve closed
5/22/2010	3:53:23 PM	Bypass valve closed
5/22/2010	3:53:23 PM	Bubbler valve closed
5/22/2010	3:53:23 PM	Helium valve opened
5/22/2010	3:53:23 PM	Helium MFC set to  500.000000
5/22/2010	3:53:23 PM	H2 MFC set to  0.000000
5/22/2010	3:53:23 PM	BCl3 MFC set to  0.000000
5/22/2010	3:53:23 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:53:23 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:53:23 PM	Tube furnace set to 0
5/22/2010	3:54:43 PM	Helium valve closed
5/22/2010	3:54:43 PM	H2 valve closed
5/22/2010	3:54:43 PM	BCl3 valve closed
5/22/2010	3:54:43 PM	PH3 valve closed
5/22/2010	3:54:43 PM	SiCl4 pre valve closed
5/22/2010	3:54:43 PM	SiCl4 post valve closed
5/22/2010	3:54:43 PM	Main Vac valve closed
5/22/2010	3:54:43 PM	Bypass valve closed
5/22/2010	3:54:43 PM	Bubbler valve closed
5/22/2010	3:54:43 PM	Helium MFC set to  0.000000
5/22/2010	3:54:43 PM	H2 MFC set to  0.000000
5/22/2010	3:54:43 PM	BCl3 MFC set to  0.000000
5/22/2010	3:54:43 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:54:43 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:54:43 PM	Tube furnace set to 0
5/22/2010	3:54:58 PM	Helium valve closed
5/22/2010	3:54:58 PM	H2 valve closed
5/22/2010	3:54:58 PM	BCl3 valve closed
5/22/2010	3:54:58 PM	PH3 valve closed
5/22/2010	3:54:58 PM	SiCl4 pre valve closed
5/22/2010	3:54:58 PM	SiCl4 post valve closed
5/22/2010	3:54:58 PM	Main Vac valve closed
5/22/2010	3:54:58 PM	Bubbler valve closed
5/22/2010	3:54:58 PM	Bypass valve opened
5/22/2010	3:54:58 PM	Helium MFC set to  0.000000
5/22/2010	3:54:58 PM	H2 MFC set to  0.000000
5/22/2010	3:54:58 PM	BCl3 MFC set to  0.000000
5/22/2010	3:54:58 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:54:58 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:54:58 PM	Tube furnace set to 0
5/22/2010	3:55:30 PM	Helium valve closed
5/22/2010	3:55:30 PM	H2 valve closed
5/22/2010	3:55:30 PM	BCl3 valve closed
5/22/2010	3:55:30 PM	PH3 valve closed
5/22/2010	3:55:30 PM	SiCl4 pre valve closed
5/22/2010	3:55:30 PM	SiCl4 post valve closed
5/22/2010	3:55:30 PM	Bubbler valve closed
5/22/2010	3:55:30 PM	Main Vac valve opened
5/22/2010	3:55:30 PM	Bypass valve opened
5/22/2010	3:55:30 PM	Helium MFC set to  0.000000
5/22/2010	3:55:30 PM	H2 MFC set to  0.000000
5/22/2010	3:55:30 PM	BCl3 MFC set to  0.000000
5/22/2010	3:55:30 PM	SiCl4 MFC set to  0.000000
5/22/2010	3:55:30 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	3:55:30 PM	Tube furnace set to 0
5/22/2010	4:00:30 PM	H2 valve closed
5/22/2010	4:00:30 PM	BCl3 valve closed
5/22/2010	4:00:30 PM	PH3 valve closed
5/22/2010	4:00:30 PM	SiCl4 pre valve closed
5/22/2010	4:00:30 PM	SiCl4 post valve closed
5/22/2010	4:00:30 PM	Main Vac valve closed
5/22/2010	4:00:30 PM	Bypass valve closed
5/22/2010	4:00:30 PM	Bubbler valve closed
5/22/2010	4:00:30 PM	Helium valve opened
5/22/2010	4:00:30 PM	Helium MFC set to  500.000000
5/22/2010	4:00:30 PM	H2 MFC set to  0.000000
5/22/2010	4:00:30 PM	BCl3 MFC set to  0.000000
5/22/2010	4:00:30 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:00:30 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:00:30 PM	Tube furnace set to 0
5/22/2010	4:01:50 PM	Helium valve closed
5/22/2010	4:01:50 PM	H2 valve closed
5/22/2010	4:01:50 PM	BCl3 valve closed
5/22/2010	4:01:50 PM	PH3 valve closed
5/22/2010	4:01:50 PM	SiCl4 pre valve closed
5/22/2010	4:01:50 PM	SiCl4 post valve closed
5/22/2010	4:01:50 PM	Main Vac valve closed
5/22/2010	4:01:50 PM	Bypass valve closed
5/22/2010	4:01:50 PM	Bubbler valve closed
5/22/2010	4:01:50 PM	Helium MFC set to  0.000000
5/22/2010	4:01:50 PM	H2 MFC set to  0.000000
5/22/2010	4:01:50 PM	BCl3 MFC set to  0.000000
5/22/2010	4:01:50 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:01:50 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:01:50 PM	Tube furnace set to 0
5/22/2010	4:02:05 PM	Helium valve closed
5/22/2010	4:02:05 PM	H2 valve closed
5/22/2010	4:02:05 PM	BCl3 valve closed
5/22/2010	4:02:05 PM	PH3 valve closed
5/22/2010	4:02:05 PM	SiCl4 pre valve closed
5/22/2010	4:02:05 PM	SiCl4 post valve closed
5/22/2010	4:02:05 PM	Main Vac valve closed
5/22/2010	4:02:05 PM	Bubbler valve closed
5/22/2010	4:02:05 PM	Bypass valve opened
5/22/2010	4:02:05 PM	Helium MFC set to  0.000000
5/22/2010	4:02:05 PM	H2 MFC set to  0.000000
5/22/2010	4:02:05 PM	BCl3 MFC set to  0.000000
5/22/2010	4:02:05 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:02:05 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:02:05 PM	Tube furnace set to 0
5/22/2010	4:02:37 PM	Helium valve closed
5/22/2010	4:02:37 PM	H2 valve closed
5/22/2010	4:02:37 PM	BCl3 valve closed
5/22/2010	4:02:37 PM	PH3 valve closed
5/22/2010	4:02:37 PM	SiCl4 pre valve closed
5/22/2010	4:02:37 PM	SiCl4 post valve closed
5/22/2010	4:02:37 PM	Bubbler valve closed
5/22/2010	4:02:37 PM	Main Vac valve opened
5/22/2010	4:02:37 PM	Bypass valve opened
5/22/2010	4:02:37 PM	Helium MFC set to  0.000000
5/22/2010	4:02:37 PM	H2 MFC set to  0.000000
5/22/2010	4:02:37 PM	BCl3 MFC set to  0.000000
5/22/2010	4:02:37 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:02:37 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:02:37 PM	Tube furnace set to 0
5/22/2010	4:07:37 PM	Helium valve closed
5/22/2010	4:07:37 PM	H2 valve closed
5/22/2010	4:07:37 PM	BCl3 valve closed
5/22/2010	4:07:37 PM	PH3 valve closed
5/22/2010	4:07:37 PM	SiCl4 pre valve closed
5/22/2010	4:07:37 PM	SiCl4 post valve closed
5/22/2010	4:07:37 PM	Bubbler valve closed
5/22/2010	4:07:37 PM	Main Vac valve opened
5/22/2010	4:07:37 PM	Bypass valve opened
5/22/2010	4:07:37 PM	Helium MFC set to  0.000000
5/22/2010	4:07:37 PM	H2 MFC set to  0.000000
5/22/2010	4:07:37 PM	BCl3 MFC set to  0.000000
5/22/2010	4:07:37 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:07:37 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:07:37 PM	Tube furnace set to 0
5/22/2010	4:07:38 PM	Run finished at 4:07 PM
5/22/2010	4:07:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	4:12:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	4:12:57 PM	Recipe started at 4:12 PM
5/22/2010	4:12:58 PM	Helium valve closed
5/22/2010	4:12:58 PM	H2 valve closed
5/22/2010	4:12:58 PM	BCl3 valve closed
5/22/2010	4:12:58 PM	PH3 valve closed
5/22/2010	4:12:58 PM	SiCl4 pre valve closed
5/22/2010	4:12:58 PM	SiCl4 post valve closed
5/22/2010	4:12:58 PM	Main Vac valve closed
5/22/2010	4:12:58 PM	Bypass valve closed
5/22/2010	4:12:58 PM	Bubbler valve closed
5/22/2010	4:12:58 PM	Helium MFC set to  0.000000
5/22/2010	4:12:58 PM	H2 MFC set to  0.000000
5/22/2010	4:12:58 PM	BCl3 MFC set to  0.000000
5/22/2010	4:12:58 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:12:58 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:12:58 PM	Tube furnace set to 0
5/22/2010	4:12:58 PM	Run finished at 4:12 PM
5/22/2010	4:12:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	4:13:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	4:13:08 PM	Recipe started at 4:13 PM
5/22/2010	4:13:08 PM	Helium valve closed
5/22/2010	4:13:08 PM	H2 valve closed
5/22/2010	4:13:08 PM	BCl3 valve closed
5/22/2010	4:13:08 PM	PH3 valve closed
5/22/2010	4:13:08 PM	SiCl4 pre valve closed
5/22/2010	4:13:08 PM	SiCl4 post valve closed
5/22/2010	4:13:08 PM	Main Vac valve closed
5/22/2010	4:13:08 PM	Bubbler valve closed
5/22/2010	4:13:08 PM	Bypass valve opened
5/22/2010	4:13:08 PM	Helium MFC set to  0.000000
5/22/2010	4:13:08 PM	H2 MFC set to  0.000000
5/22/2010	4:13:08 PM	BCl3 MFC set to  0.000000
5/22/2010	4:13:08 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:13:08 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:13:08 PM	Tube furnace set to 0
5/22/2010	4:13:08 PM	Helium valve closed
5/22/2010	4:13:08 PM	H2 valve closed
5/22/2010	4:13:08 PM	BCl3 valve closed
5/22/2010	4:13:08 PM	PH3 valve closed
5/22/2010	4:13:08 PM	SiCl4 pre valve closed
5/22/2010	4:13:08 PM	SiCl4 post valve closed
5/22/2010	4:13:08 PM	Bubbler valve closed
5/22/2010	4:13:08 PM	Main Vac valve opened
5/22/2010	4:13:08 PM	Bypass valve opened
5/22/2010	4:13:08 PM	Helium MFC set to  0.000000
5/22/2010	4:13:08 PM	H2 MFC set to  0.000000
5/22/2010	4:13:08 PM	BCl3 MFC set to  0.000000
5/22/2010	4:13:08 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:13:08 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:13:08 PM	Tube furnace set to 0
5/22/2010	4:13:09 PM	Run finished at 4:13 PM
5/22/2010	4:13:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	4:13:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	4:13:41 PM	Recipe started at 4:13 PM
5/22/2010	4:13:41 PM	Helium valve closed
5/22/2010	4:13:41 PM	H2 valve closed
5/22/2010	4:13:41 PM	BCl3 valve closed
5/22/2010	4:13:41 PM	PH3 valve closed
5/22/2010	4:13:41 PM	SiCl4 pre valve closed
5/22/2010	4:13:41 PM	SiCl4 post valve closed
5/22/2010	4:13:41 PM	Main Vac valve closed
5/22/2010	4:13:41 PM	Bypass valve closed
5/22/2010	4:13:41 PM	Bubbler valve closed
5/22/2010	4:13:41 PM	Helium MFC set to  0.000000
5/22/2010	4:13:41 PM	H2 MFC set to  0.000000
5/22/2010	4:13:41 PM	BCl3 MFC set to  0.000000
5/22/2010	4:13:41 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:13:41 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:13:41 PM	Tube furnace set to 0
5/22/2010	4:13:41 PM	Run finished at 4:13 PM
5/22/2010	4:13:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	4:13:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	4:13:51 PM	Recipe started at 4:13 PM
5/22/2010	4:13:51 PM	Helium valve closed
5/22/2010	4:13:51 PM	H2 valve closed
5/22/2010	4:13:51 PM	BCl3 valve closed
5/22/2010	4:13:51 PM	PH3 valve closed
5/22/2010	4:13:51 PM	SiCl4 pre valve closed
5/22/2010	4:13:51 PM	SiCl4 post valve closed
5/22/2010	4:13:51 PM	Main Vac valve closed
5/22/2010	4:13:51 PM	Bubbler valve closed
5/22/2010	4:13:51 PM	Bypass valve opened
5/22/2010	4:13:51 PM	Helium MFC set to  0.000000
5/22/2010	4:13:51 PM	H2 MFC set to  0.000000
5/22/2010	4:13:51 PM	BCl3 MFC set to  0.000000
5/22/2010	4:13:51 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:13:51 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:13:51 PM	Tube furnace set to 0
5/22/2010	4:13:52 PM	Helium valve closed
5/22/2010	4:13:52 PM	H2 valve closed
5/22/2010	4:13:52 PM	BCl3 valve closed
5/22/2010	4:13:52 PM	PH3 valve closed
5/22/2010	4:13:52 PM	SiCl4 pre valve closed
5/22/2010	4:13:52 PM	SiCl4 post valve closed
5/22/2010	4:13:52 PM	Bubbler valve closed
5/22/2010	4:13:52 PM	Main Vac valve opened
5/22/2010	4:13:52 PM	Bypass valve opened
5/22/2010	4:13:52 PM	Helium MFC set to  0.000000
5/22/2010	4:13:52 PM	H2 MFC set to  0.000000
5/22/2010	4:13:52 PM	BCl3 MFC set to  0.000000
5/22/2010	4:13:52 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:13:52 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:13:52 PM	Tube furnace set to 0
5/22/2010	4:13:52 PM	Run finished at 4:13 PM
5/22/2010	4:13:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	4:14:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	4:14:09 PM	Recipe started at 4:14 PM
5/22/2010	4:14:09 PM	Helium valve closed
5/22/2010	4:14:09 PM	H2 valve closed
5/22/2010	4:14:09 PM	BCl3 valve closed
5/22/2010	4:14:09 PM	PH3 valve closed
5/22/2010	4:14:09 PM	SiCl4 pre valve closed
5/22/2010	4:14:09 PM	SiCl4 post valve closed
5/22/2010	4:14:09 PM	Main Vac valve closed
5/22/2010	4:14:09 PM	Bypass valve closed
5/22/2010	4:14:09 PM	Bubbler valve closed
5/22/2010	4:14:09 PM	Helium MFC set to  0.000000
5/22/2010	4:14:09 PM	H2 MFC set to  0.000000
5/22/2010	4:14:09 PM	BCl3 MFC set to  0.000000
5/22/2010	4:14:09 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:14:09 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:14:09 PM	Tube furnace set to 0
5/22/2010	4:14:09 PM	Run finished at 4:14 PM
5/22/2010	4:14:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	4:14:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	4:14:22 PM	Recipe started at 4:14 PM
5/22/2010	4:14:22 PM	Helium valve closed
5/22/2010	4:14:22 PM	H2 valve closed
5/22/2010	4:14:22 PM	BCl3 valve closed
5/22/2010	4:14:22 PM	PH3 valve closed
5/22/2010	4:14:22 PM	SiCl4 pre valve closed
5/22/2010	4:14:22 PM	SiCl4 post valve closed
5/22/2010	4:14:22 PM	Main Vac valve closed
5/22/2010	4:14:22 PM	Bubbler valve closed
5/22/2010	4:14:22 PM	Bypass valve opened
5/22/2010	4:14:22 PM	Helium MFC set to  0.000000
5/22/2010	4:14:22 PM	H2 MFC set to  0.000000
5/22/2010	4:14:22 PM	BCl3 MFC set to  0.000000
5/22/2010	4:14:22 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:14:22 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:14:22 PM	Tube furnace set to 0
5/22/2010	4:14:23 PM	Helium valve closed
5/22/2010	4:14:23 PM	H2 valve closed
5/22/2010	4:14:23 PM	BCl3 valve closed
5/22/2010	4:14:23 PM	PH3 valve closed
5/22/2010	4:14:23 PM	SiCl4 pre valve closed
5/22/2010	4:14:23 PM	SiCl4 post valve closed
5/22/2010	4:14:23 PM	Bubbler valve closed
5/22/2010	4:14:23 PM	Main Vac valve opened
5/22/2010	4:14:23 PM	Bypass valve opened
5/22/2010	4:14:23 PM	Helium MFC set to  0.000000
5/22/2010	4:14:23 PM	H2 MFC set to  0.000000
5/22/2010	4:14:23 PM	BCl3 MFC set to  0.000000
5/22/2010	4:14:23 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:14:23 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:14:23 PM	Tube furnace set to 0
5/22/2010	4:14:23 PM	Run finished at 4:14 PM
5/22/2010	4:14:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	4:14:53 PM	Recipe started at 4:14 PM
5/22/2010	4:14:53 PM	Helium valve closed
5/22/2010	4:14:53 PM	BCl3 valve closed
5/22/2010	4:14:53 PM	PH3 valve closed
5/22/2010	4:14:53 PM	SiCl4 pre valve closed
5/22/2010	4:14:53 PM	SiCl4 post valve closed
5/22/2010	4:14:53 PM	Main Vac valve closed
5/22/2010	4:14:53 PM	Bypass valve closed
5/22/2010	4:14:53 PM	Bubbler valve closed
5/22/2010	4:14:53 PM	H2 valve opened
5/22/2010	4:14:53 PM	Helium MFC set to  0.000000
5/22/2010	4:14:53 PM	H2 MFC set to  500.000000
5/22/2010	4:14:53 PM	BCl3 MFC set to  0.000000
5/22/2010	4:14:53 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:14:53 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:14:53 PM	Tube furnace set to 0
5/22/2010	4:16:13 PM	Helium valve closed
5/22/2010	4:16:13 PM	BCl3 valve closed
5/22/2010	4:16:13 PM	PH3 valve closed
5/22/2010	4:16:13 PM	SiCl4 pre valve closed
5/22/2010	4:16:13 PM	SiCl4 post valve closed
5/22/2010	4:16:13 PM	Main Vac valve closed
5/22/2010	4:16:13 PM	Bypass valve closed
5/22/2010	4:16:13 PM	H2 valve opened
5/22/2010	4:16:13 PM	Bubbler valve opened
5/22/2010	4:16:13 PM	Helium MFC set to  0.000000
5/22/2010	4:16:13 PM	H2 MFC set to  500.000000
5/22/2010	4:16:13 PM	BCl3 MFC set to  0.000000
5/22/2010	4:16:13 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:16:13 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:16:13 PM	Tube furnace set to 1000
5/22/2010	4:36:13 PM	Helium valve closed
5/22/2010	4:36:13 PM	PH3 valve closed
5/22/2010	4:36:13 PM	Main Vac valve closed
5/22/2010	4:36:13 PM	Bypass valve closed
5/22/2010	4:36:13 PM	H2 valve opened
5/22/2010	4:36:13 PM	BCl3 valve opened
5/22/2010	4:36:13 PM	SiCl4 pre valve opened
5/22/2010	4:36:13 PM	SiCl4 post valve opened
5/22/2010	4:36:13 PM	Bubbler valve opened
5/22/2010	4:36:13 PM	Helium MFC set to  0.000000
5/22/2010	4:36:13 PM	H2 MFC set to  500.000000
5/22/2010	4:36:13 PM	BCl3 MFC set to  35.000000
5/22/2010	4:36:13 PM	SiCl4 MFC set to  350.000000
5/22/2010	4:36:13 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:36:14 PM	Tube furnace set to 1000
5/22/2010	4:51:14 PM	H2 valve closed
5/22/2010	4:51:14 PM	BCl3 valve closed
5/22/2010	4:51:14 PM	PH3 valve closed
5/22/2010	4:51:14 PM	SiCl4 pre valve closed
5/22/2010	4:51:14 PM	SiCl4 post valve closed
5/22/2010	4:51:14 PM	Main Vac valve closed
5/22/2010	4:51:14 PM	Bypass valve closed
5/22/2010	4:51:14 PM	Helium valve opened
5/22/2010	4:51:14 PM	Bubbler valve opened
5/22/2010	4:51:14 PM	Helium MFC set to  500.000000
5/22/2010	4:51:14 PM	H2 MFC set to  0.000000
5/22/2010	4:51:14 PM	BCl3 MFC set to  0.000000
5/22/2010	4:51:14 PM	SiCl4 MFC set to  0.000000
5/22/2010	4:51:14 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	4:51:14 PM	Tube furnace set to 0
5/22/2010	5:11:14 PM	Helium valve closed
5/22/2010	5:11:14 PM	H2 valve closed
5/22/2010	5:11:14 PM	BCl3 valve closed
5/22/2010	5:11:14 PM	PH3 valve closed
5/22/2010	5:11:14 PM	SiCl4 pre valve closed
5/22/2010	5:11:14 PM	SiCl4 post valve closed
5/22/2010	5:11:14 PM	Main Vac valve closed
5/22/2010	5:11:14 PM	Bypass valve closed
5/22/2010	5:11:14 PM	Bubbler valve closed
5/22/2010	5:11:14 PM	Helium MFC set to  0.000000
5/22/2010	5:11:14 PM	H2 MFC set to  0.000000
5/22/2010	5:11:14 PM	BCl3 MFC set to  0.000000
5/22/2010	5:11:14 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:11:14 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:11:14 PM	Tube furnace set to 0
5/22/2010	5:11:14 PM	Run finished at 5:11 PM
5/22/2010	5:37:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	5:37:35 PM	Recipe started at 5:37 PM
5/22/2010	5:37:35 PM	Helium valve closed
5/22/2010	5:37:35 PM	H2 valve closed
5/22/2010	5:37:35 PM	BCl3 valve closed
5/22/2010	5:37:35 PM	PH3 valve closed
5/22/2010	5:37:35 PM	SiCl4 pre valve closed
5/22/2010	5:37:35 PM	SiCl4 post valve closed
5/22/2010	5:37:35 PM	Main Vac valve closed
5/22/2010	5:37:35 PM	Bubbler valve closed
5/22/2010	5:37:35 PM	Bypass valve opened
5/22/2010	5:37:35 PM	Helium MFC set to  0.000000
5/22/2010	5:37:35 PM	H2 MFC set to  0.000000
5/22/2010	5:37:35 PM	BCl3 MFC set to  0.000000
5/22/2010	5:37:35 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:37:35 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:37:36 PM	Tube furnace set to 0
5/22/2010	5:38:23 PM	Helium valve closed
5/22/2010	5:38:23 PM	H2 valve closed
5/22/2010	5:38:23 PM	BCl3 valve closed
5/22/2010	5:38:23 PM	PH3 valve closed
5/22/2010	5:38:23 PM	SiCl4 pre valve closed
5/22/2010	5:38:23 PM	SiCl4 post valve closed
5/22/2010	5:38:23 PM	Bubbler valve closed
5/22/2010	5:38:23 PM	Main Vac valve opened
5/22/2010	5:38:23 PM	Bypass valve opened
5/22/2010	5:38:23 PM	Helium MFC set to  0.000000
5/22/2010	5:38:23 PM	H2 MFC set to  0.000000
5/22/2010	5:38:23 PM	BCl3 MFC set to  0.000000
5/22/2010	5:38:23 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:38:23 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:38:24 PM	Tube furnace set to 0
5/22/2010	5:38:24 PM	Run finished at 5:38 PM
5/22/2010	5:38:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	5:38:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	5:38:44 PM	Recipe started at 5:38 PM
5/22/2010	5:38:44 PM	H2 valve closed
5/22/2010	5:38:44 PM	BCl3 valve closed
5/22/2010	5:38:44 PM	PH3 valve closed
5/22/2010	5:38:44 PM	SiCl4 pre valve closed
5/22/2010	5:38:44 PM	SiCl4 post valve closed
5/22/2010	5:38:44 PM	Main Vac valve closed
5/22/2010	5:38:44 PM	Bypass valve closed
5/22/2010	5:38:44 PM	Bubbler valve closed
5/22/2010	5:38:44 PM	Helium valve opened
5/22/2010	5:38:44 PM	Helium MFC set to  500.000000
5/22/2010	5:38:44 PM	H2 MFC set to  0.000000
5/22/2010	5:38:44 PM	BCl3 MFC set to  0.000000
5/22/2010	5:38:44 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:38:44 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:38:44 PM	Tube furnace set to 0
5/22/2010	5:40:04 PM	Helium valve closed
5/22/2010	5:40:04 PM	H2 valve closed
5/22/2010	5:40:04 PM	BCl3 valve closed
5/22/2010	5:40:04 PM	PH3 valve closed
5/22/2010	5:40:04 PM	SiCl4 pre valve closed
5/22/2010	5:40:04 PM	SiCl4 post valve closed
5/22/2010	5:40:04 PM	Main Vac valve closed
5/22/2010	5:40:04 PM	Bypass valve closed
5/22/2010	5:40:04 PM	Bubbler valve closed
5/22/2010	5:40:04 PM	Helium MFC set to  0.000000
5/22/2010	5:40:04 PM	H2 MFC set to  0.000000
5/22/2010	5:40:04 PM	BCl3 MFC set to  0.000000
5/22/2010	5:40:04 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:40:04 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:40:04 PM	Tube furnace set to 0
5/22/2010	5:40:19 PM	Helium valve closed
5/22/2010	5:40:19 PM	H2 valve closed
5/22/2010	5:40:19 PM	BCl3 valve closed
5/22/2010	5:40:19 PM	PH3 valve closed
5/22/2010	5:40:19 PM	SiCl4 pre valve closed
5/22/2010	5:40:19 PM	SiCl4 post valve closed
5/22/2010	5:40:19 PM	Main Vac valve closed
5/22/2010	5:40:19 PM	Bubbler valve closed
5/22/2010	5:40:19 PM	Bypass valve opened
5/22/2010	5:40:19 PM	Helium MFC set to  0.000000
5/22/2010	5:40:19 PM	H2 MFC set to  0.000000
5/22/2010	5:40:19 PM	BCl3 MFC set to  0.000000
5/22/2010	5:40:19 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:40:19 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:40:19 PM	Tube furnace set to 0
5/22/2010	5:40:52 PM	Helium valve closed
5/22/2010	5:40:52 PM	H2 valve closed
5/22/2010	5:40:52 PM	BCl3 valve closed
5/22/2010	5:40:52 PM	PH3 valve closed
5/22/2010	5:40:52 PM	SiCl4 pre valve closed
5/22/2010	5:40:52 PM	SiCl4 post valve closed
5/22/2010	5:40:52 PM	Bubbler valve closed
5/22/2010	5:40:52 PM	Main Vac valve opened
5/22/2010	5:40:52 PM	Bypass valve opened
5/22/2010	5:40:52 PM	Helium MFC set to  0.000000
5/22/2010	5:40:52 PM	H2 MFC set to  0.000000
5/22/2010	5:40:52 PM	BCl3 MFC set to  0.000000
5/22/2010	5:40:52 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:40:52 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:40:52 PM	Tube furnace set to 0
5/22/2010	5:45:52 PM	H2 valve closed
5/22/2010	5:45:52 PM	BCl3 valve closed
5/22/2010	5:45:52 PM	PH3 valve closed
5/22/2010	5:45:52 PM	SiCl4 pre valve closed
5/22/2010	5:45:52 PM	SiCl4 post valve closed
5/22/2010	5:45:52 PM	Main Vac valve closed
5/22/2010	5:45:52 PM	Bypass valve closed
5/22/2010	5:45:52 PM	Bubbler valve closed
5/22/2010	5:45:52 PM	Helium valve opened
5/22/2010	5:45:52 PM	Helium MFC set to  500.000000
5/22/2010	5:45:52 PM	H2 MFC set to  0.000000
5/22/2010	5:45:52 PM	BCl3 MFC set to  0.000000
5/22/2010	5:45:52 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:45:52 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:45:52 PM	Tube furnace set to 0
5/22/2010	5:47:11 PM	Helium valve closed
5/22/2010	5:47:11 PM	H2 valve closed
5/22/2010	5:47:11 PM	BCl3 valve closed
5/22/2010	5:47:11 PM	PH3 valve closed
5/22/2010	5:47:11 PM	SiCl4 pre valve closed
5/22/2010	5:47:11 PM	SiCl4 post valve closed
5/22/2010	5:47:11 PM	Main Vac valve closed
5/22/2010	5:47:11 PM	Bypass valve closed
5/22/2010	5:47:11 PM	Bubbler valve closed
5/22/2010	5:47:11 PM	Helium MFC set to  0.000000
5/22/2010	5:47:11 PM	H2 MFC set to  0.000000
5/22/2010	5:47:11 PM	BCl3 MFC set to  0.000000
5/22/2010	5:47:11 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:47:11 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:47:11 PM	Tube furnace set to 0
5/22/2010	5:47:26 PM	Helium valve closed
5/22/2010	5:47:26 PM	H2 valve closed
5/22/2010	5:47:26 PM	BCl3 valve closed
5/22/2010	5:47:26 PM	PH3 valve closed
5/22/2010	5:47:26 PM	SiCl4 pre valve closed
5/22/2010	5:47:26 PM	SiCl4 post valve closed
5/22/2010	5:47:26 PM	Main Vac valve closed
5/22/2010	5:47:26 PM	Bubbler valve closed
5/22/2010	5:47:26 PM	Bypass valve opened
5/22/2010	5:47:26 PM	Helium MFC set to  0.000000
5/22/2010	5:47:26 PM	H2 MFC set to  0.000000
5/22/2010	5:47:26 PM	BCl3 MFC set to  0.000000
5/22/2010	5:47:26 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:47:26 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:47:26 PM	Tube furnace set to 0
5/22/2010	5:47:58 PM	Helium valve closed
5/22/2010	5:47:58 PM	H2 valve closed
5/22/2010	5:47:58 PM	BCl3 valve closed
5/22/2010	5:47:58 PM	PH3 valve closed
5/22/2010	5:47:58 PM	SiCl4 pre valve closed
5/22/2010	5:47:58 PM	SiCl4 post valve closed
5/22/2010	5:47:58 PM	Bubbler valve closed
5/22/2010	5:47:58 PM	Main Vac valve opened
5/22/2010	5:47:58 PM	Bypass valve opened
5/22/2010	5:47:58 PM	Helium MFC set to  0.000000
5/22/2010	5:47:58 PM	H2 MFC set to  0.000000
5/22/2010	5:47:58 PM	BCl3 MFC set to  0.000000
5/22/2010	5:47:58 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:47:58 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:47:58 PM	Tube furnace set to 0
5/22/2010	5:52:58 PM	H2 valve closed
5/22/2010	5:52:58 PM	BCl3 valve closed
5/22/2010	5:52:58 PM	PH3 valve closed
5/22/2010	5:52:58 PM	SiCl4 pre valve closed
5/22/2010	5:52:58 PM	SiCl4 post valve closed
5/22/2010	5:52:58 PM	Main Vac valve closed
5/22/2010	5:52:58 PM	Bypass valve closed
5/22/2010	5:52:58 PM	Bubbler valve closed
5/22/2010	5:52:58 PM	Helium valve opened
5/22/2010	5:52:58 PM	Helium MFC set to  500.000000
5/22/2010	5:52:58 PM	H2 MFC set to  0.000000
5/22/2010	5:52:58 PM	BCl3 MFC set to  0.000000
5/22/2010	5:52:58 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:52:58 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:52:58 PM	Tube furnace set to 0
5/22/2010	5:54:16 PM	Helium valve closed
5/22/2010	5:54:16 PM	H2 valve closed
5/22/2010	5:54:16 PM	BCl3 valve closed
5/22/2010	5:54:16 PM	PH3 valve closed
5/22/2010	5:54:16 PM	SiCl4 pre valve closed
5/22/2010	5:54:16 PM	SiCl4 post valve closed
5/22/2010	5:54:16 PM	Main Vac valve closed
5/22/2010	5:54:16 PM	Bypass valve closed
5/22/2010	5:54:16 PM	Bubbler valve closed
5/22/2010	5:54:16 PM	Helium MFC set to  0.000000
5/22/2010	5:54:16 PM	H2 MFC set to  0.000000
5/22/2010	5:54:16 PM	BCl3 MFC set to  0.000000
5/22/2010	5:54:16 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:54:16 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:54:17 PM	Tube furnace set to 0
5/22/2010	5:54:32 PM	Helium valve closed
5/22/2010	5:54:32 PM	H2 valve closed
5/22/2010	5:54:32 PM	BCl3 valve closed
5/22/2010	5:54:32 PM	PH3 valve closed
5/22/2010	5:54:32 PM	SiCl4 pre valve closed
5/22/2010	5:54:32 PM	SiCl4 post valve closed
5/22/2010	5:54:32 PM	Main Vac valve closed
5/22/2010	5:54:32 PM	Bubbler valve closed
5/22/2010	5:54:32 PM	Bypass valve opened
5/22/2010	5:54:32 PM	Helium MFC set to  0.000000
5/22/2010	5:54:32 PM	H2 MFC set to  0.000000
5/22/2010	5:54:32 PM	BCl3 MFC set to  0.000000
5/22/2010	5:54:32 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:54:32 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:54:32 PM	Tube furnace set to 0
5/22/2010	5:55:03 PM	Helium valve closed
5/22/2010	5:55:03 PM	H2 valve closed
5/22/2010	5:55:03 PM	BCl3 valve closed
5/22/2010	5:55:03 PM	PH3 valve closed
5/22/2010	5:55:03 PM	SiCl4 pre valve closed
5/22/2010	5:55:03 PM	SiCl4 post valve closed
5/22/2010	5:55:03 PM	Bubbler valve closed
5/22/2010	5:55:03 PM	Main Vac valve opened
5/22/2010	5:55:03 PM	Bypass valve opened
5/22/2010	5:55:03 PM	Helium MFC set to  0.000000
5/22/2010	5:55:03 PM	H2 MFC set to  0.000000
5/22/2010	5:55:03 PM	BCl3 MFC set to  0.000000
5/22/2010	5:55:03 PM	SiCl4 MFC set to  0.000000
5/22/2010	5:55:03 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	5:55:03 PM	Tube furnace set to 0
5/22/2010	6:00:04 PM	Helium valve closed
5/22/2010	6:00:04 PM	H2 valve closed
5/22/2010	6:00:04 PM	BCl3 valve closed
5/22/2010	6:00:04 PM	PH3 valve closed
5/22/2010	6:00:04 PM	SiCl4 pre valve closed
5/22/2010	6:00:04 PM	SiCl4 post valve closed
5/22/2010	6:00:04 PM	Bubbler valve closed
5/22/2010	6:00:04 PM	Main Vac valve opened
5/22/2010	6:00:04 PM	Bypass valve opened
5/22/2010	6:00:04 PM	Helium MFC set to  0.000000
5/22/2010	6:00:04 PM	H2 MFC set to  0.000000
5/22/2010	6:00:04 PM	BCl3 MFC set to  0.000000
5/22/2010	6:00:04 PM	SiCl4 MFC set to  0.000000
5/22/2010	6:00:04 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	6:00:04 PM	Tube furnace set to 0
5/22/2010	6:00:05 PM	Run finished at 6:00 PM
5/22/2010	6:00:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/22/2010	6:00:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	6:00:10 PM	Recipe started at 6:00 PM
5/22/2010	6:00:10 PM	Helium valve closed
5/22/2010	6:00:10 PM	H2 valve closed
5/22/2010	6:00:10 PM	BCl3 valve closed
5/22/2010	6:00:10 PM	PH3 valve closed
5/22/2010	6:00:10 PM	SiCl4 pre valve closed
5/22/2010	6:00:10 PM	SiCl4 post valve closed
5/22/2010	6:00:10 PM	Main Vac valve closed
5/22/2010	6:00:10 PM	Bypass valve closed
5/22/2010	6:00:10 PM	Bubbler valve closed
5/22/2010	6:00:10 PM	Helium MFC set to  0.000000
5/22/2010	6:00:10 PM	H2 MFC set to  0.000000
5/22/2010	6:00:10 PM	BCl3 MFC set to  0.000000
5/22/2010	6:00:10 PM	SiCl4 MFC set to  0.000000
5/22/2010	6:00:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	6:00:10 PM	Tube furnace set to 0
5/22/2010	6:00:10 PM	Run finished at 6:00 PM
5/22/2010	6:00:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/22/2010	6:00:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	6:00:22 PM	Recipe started at 6:00 PM
5/22/2010	6:00:22 PM	Helium valve closed
5/22/2010	6:00:22 PM	H2 valve closed
5/22/2010	6:00:22 PM	BCl3 valve closed
5/22/2010	6:00:22 PM	PH3 valve closed
5/22/2010	6:00:22 PM	SiCl4 pre valve closed
5/22/2010	6:00:22 PM	SiCl4 post valve closed
5/22/2010	6:00:22 PM	Main Vac valve closed
5/22/2010	6:00:22 PM	Bubbler valve closed
5/22/2010	6:00:22 PM	Bypass valve opened
5/22/2010	6:00:22 PM	Helium MFC set to  0.000000
5/22/2010	6:00:22 PM	H2 MFC set to  0.000000
5/22/2010	6:00:22 PM	BCl3 MFC set to  0.000000
5/22/2010	6:00:22 PM	SiCl4 MFC set to  0.000000
5/22/2010	6:00:22 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	6:00:22 PM	Tube furnace set to 0
5/22/2010	6:00:22 PM	Helium valve closed
5/22/2010	6:00:22 PM	H2 valve closed
5/22/2010	6:00:22 PM	BCl3 valve closed
5/22/2010	6:00:22 PM	PH3 valve closed
5/22/2010	6:00:22 PM	SiCl4 pre valve closed
5/22/2010	6:00:22 PM	SiCl4 post valve closed
5/22/2010	6:00:22 PM	Bubbler valve closed
5/22/2010	6:00:22 PM	Main Vac valve opened
5/22/2010	6:00:22 PM	Bypass valve opened
5/22/2010	6:00:22 PM	Helium MFC set to  0.000000
5/22/2010	6:00:22 PM	H2 MFC set to  0.000000
5/22/2010	6:00:22 PM	BCl3 MFC set to  0.000000
5/22/2010	6:00:22 PM	SiCl4 MFC set to  0.000000
5/22/2010	6:00:22 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	6:00:22 PM	Tube furnace set to 0
5/22/2010	6:00:23 PM	Run finished at 6:00 PM
5/22/2010	6:00:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	6:00:51 PM	Recipe started at 6:00 PM
5/22/2010	6:00:51 PM	Helium valve closed
5/22/2010	6:00:51 PM	BCl3 valve closed
5/22/2010	6:00:51 PM	PH3 valve closed
5/22/2010	6:00:51 PM	SiCl4 pre valve closed
5/22/2010	6:00:51 PM	SiCl4 post valve closed
5/22/2010	6:00:51 PM	Main Vac valve closed
5/22/2010	6:00:51 PM	Bypass valve closed
5/22/2010	6:00:51 PM	Bubbler valve closed
5/22/2010	6:00:51 PM	H2 valve opened
5/22/2010	6:00:51 PM	Helium MFC set to  0.000000
5/22/2010	6:00:51 PM	H2 MFC set to  500.000000
5/22/2010	6:00:51 PM	BCl3 MFC set to  0.000000
5/22/2010	6:00:51 PM	SiCl4 MFC set to  0.000000
5/22/2010	6:00:51 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	6:00:51 PM	Tube furnace set to 0
5/22/2010	6:02:10 PM	Helium valve closed
5/22/2010	6:02:10 PM	BCl3 valve closed
5/22/2010	6:02:10 PM	PH3 valve closed
5/22/2010	6:02:10 PM	SiCl4 pre valve closed
5/22/2010	6:02:10 PM	SiCl4 post valve closed
5/22/2010	6:02:10 PM	Main Vac valve closed
5/22/2010	6:02:10 PM	Bypass valve closed
5/22/2010	6:02:10 PM	H2 valve opened
5/22/2010	6:02:10 PM	Bubbler valve opened
5/22/2010	6:02:10 PM	Helium MFC set to  0.000000
5/22/2010	6:02:10 PM	H2 MFC set to  500.000000
5/22/2010	6:02:10 PM	BCl3 MFC set to  0.000000
5/22/2010	6:02:10 PM	SiCl4 MFC set to  0.000000
5/22/2010	6:02:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	6:02:10 PM	Tube furnace set to 1000
5/22/2010	6:22:10 PM	Helium valve closed
5/22/2010	6:22:10 PM	PH3 valve closed
5/22/2010	6:22:10 PM	Main Vac valve closed
5/22/2010	6:22:10 PM	Bypass valve closed
5/22/2010	6:22:10 PM	H2 valve opened
5/22/2010	6:22:10 PM	BCl3 valve opened
5/22/2010	6:22:10 PM	SiCl4 pre valve opened
5/22/2010	6:22:10 PM	SiCl4 post valve opened
5/22/2010	6:22:10 PM	Bubbler valve opened
5/22/2010	6:22:10 PM	Helium MFC set to  0.000000
5/22/2010	6:22:10 PM	H2 MFC set to  500.000000
5/22/2010	6:22:10 PM	BCl3 MFC set to  10.000000
5/22/2010	6:22:10 PM	SiCl4 MFC set to  500.000000
5/22/2010	6:22:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	6:22:10 PM	Tube furnace set to 1000
5/22/2010	6:37:10 PM	H2 valve closed
5/22/2010	6:37:10 PM	BCl3 valve closed
5/22/2010	6:37:10 PM	PH3 valve closed
5/22/2010	6:37:10 PM	SiCl4 pre valve closed
5/22/2010	6:37:10 PM	SiCl4 post valve closed
5/22/2010	6:37:10 PM	Main Vac valve closed
5/22/2010	6:37:10 PM	Bypass valve closed
5/22/2010	6:37:10 PM	Helium valve opened
5/22/2010	6:37:10 PM	Bubbler valve opened
5/22/2010	6:37:10 PM	Helium MFC set to  500.000000
5/22/2010	6:37:10 PM	H2 MFC set to  0.000000
5/22/2010	6:37:10 PM	BCl3 MFC set to  0.000000
5/22/2010	6:37:10 PM	SiCl4 MFC set to  0.000000
5/22/2010	6:37:10 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	6:37:11 PM	Tube furnace set to 0
5/22/2010	6:57:11 PM	Helium valve closed
5/22/2010	6:57:11 PM	H2 valve closed
5/22/2010	6:57:11 PM	BCl3 valve closed
5/22/2010	6:57:11 PM	PH3 valve closed
5/22/2010	6:57:11 PM	SiCl4 pre valve closed
5/22/2010	6:57:11 PM	SiCl4 post valve closed
5/22/2010	6:57:11 PM	Main Vac valve closed
5/22/2010	6:57:11 PM	Bypass valve closed
5/22/2010	6:57:11 PM	Bubbler valve closed
5/22/2010	6:57:11 PM	Helium MFC set to  0.000000
5/22/2010	6:57:11 PM	H2 MFC set to  0.000000
5/22/2010	6:57:11 PM	BCl3 MFC set to  0.000000
5/22/2010	6:57:11 PM	SiCl4 MFC set to  0.000000
5/22/2010	6:57:11 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	6:57:11 PM	Tube furnace set to 0
5/22/2010	6:57:11 PM	Run finished at 6:57 PM
5/22/2010	7:08:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	7:08:35 PM	Recipe started at 7:08 PM
5/22/2010	7:08:35 PM	Helium valve closed
5/22/2010	7:08:35 PM	H2 valve closed
5/22/2010	7:08:35 PM	BCl3 valve closed
5/22/2010	7:08:35 PM	PH3 valve closed
5/22/2010	7:08:35 PM	SiCl4 pre valve closed
5/22/2010	7:08:35 PM	SiCl4 post valve closed
5/22/2010	7:08:35 PM	Main Vac valve closed
5/22/2010	7:08:35 PM	Bubbler valve closed
5/22/2010	7:08:35 PM	Bypass valve opened
5/22/2010	7:08:35 PM	Helium MFC set to  0.000000
5/22/2010	7:08:35 PM	H2 MFC set to  0.000000
5/22/2010	7:08:35 PM	BCl3 MFC set to  0.000000
5/22/2010	7:08:35 PM	SiCl4 MFC set to  0.000000
5/22/2010	7:08:35 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	7:08:35 PM	Tube furnace set to 0
5/22/2010	7:09:22 PM	Helium valve closed
5/22/2010	7:09:22 PM	H2 valve closed
5/22/2010	7:09:22 PM	BCl3 valve closed
5/22/2010	7:09:22 PM	PH3 valve closed
5/22/2010	7:09:22 PM	SiCl4 pre valve closed
5/22/2010	7:09:22 PM	SiCl4 post valve closed
5/22/2010	7:09:22 PM	Bubbler valve closed
5/22/2010	7:09:22 PM	Main Vac valve opened
5/22/2010	7:09:22 PM	Bypass valve opened
5/22/2010	7:09:22 PM	Helium MFC set to  0.000000
5/22/2010	7:09:22 PM	H2 MFC set to  0.000000
5/22/2010	7:09:22 PM	BCl3 MFC set to  0.000000
5/22/2010	7:09:22 PM	SiCl4 MFC set to  0.000000
5/22/2010	7:09:22 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	7:09:23 PM	Tube furnace set to 0
5/22/2010	7:09:23 PM	Run finished at 7:09 PM
5/22/2010	7:09:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	8:43:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	8:43:03 PM	Recipe started at 8:43 PM
5/22/2010	8:43:03 PM	H2 valve closed
5/22/2010	8:43:03 PM	BCl3 valve closed
5/22/2010	8:43:03 PM	PH3 valve closed
5/22/2010	8:43:03 PM	SiCl4 pre valve closed
5/22/2010	8:43:03 PM	SiCl4 post valve closed
5/22/2010	8:43:03 PM	Main Vac valve closed
5/22/2010	8:43:03 PM	Bypass valve closed
5/22/2010	8:43:03 PM	Bubbler valve closed
5/22/2010	8:43:03 PM	Helium valve opened
5/22/2010	8:43:03 PM	Helium MFC set to  500.000000
5/22/2010	8:43:03 PM	H2 MFC set to  0.000000
5/22/2010	8:43:03 PM	BCl3 MFC set to  0.000000
5/22/2010	8:43:03 PM	SiCl4 MFC set to  0.000000
5/22/2010	8:43:03 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	8:43:03 PM	Tube furnace set to 0
5/22/2010	8:44:21 PM	Helium valve closed
5/22/2010	8:44:21 PM	H2 valve closed
5/22/2010	8:44:21 PM	BCl3 valve closed
5/22/2010	8:44:21 PM	PH3 valve closed
5/22/2010	8:44:21 PM	SiCl4 pre valve closed
5/22/2010	8:44:21 PM	SiCl4 post valve closed
5/22/2010	8:44:21 PM	Main Vac valve closed
5/22/2010	8:44:21 PM	Bypass valve closed
5/22/2010	8:44:21 PM	Bubbler valve closed
5/22/2010	8:44:21 PM	Helium MFC set to  0.000000
5/22/2010	8:44:21 PM	H2 MFC set to  0.000000
5/22/2010	8:44:21 PM	BCl3 MFC set to  0.000000
5/22/2010	8:44:21 PM	SiCl4 MFC set to  0.000000
5/22/2010	8:44:21 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	8:44:21 PM	Tube furnace set to 0
5/22/2010	8:44:21 PM	Run finished at 8:44 PM
5/22/2010	8:44:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	8:48:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	8:48:09 PM	Recipe started at 8:48 PM
5/22/2010	8:48:09 PM	Helium valve closed
5/22/2010	8:48:09 PM	H2 valve closed
5/22/2010	8:48:09 PM	BCl3 valve closed
5/22/2010	8:48:09 PM	PH3 valve closed
5/22/2010	8:48:09 PM	SiCl4 pre valve closed
5/22/2010	8:48:09 PM	SiCl4 post valve closed
5/22/2010	8:48:09 PM	Main Vac valve closed
5/22/2010	8:48:09 PM	Bubbler valve closed
5/22/2010	8:48:09 PM	Bypass valve opened
5/22/2010	8:48:09 PM	Helium MFC set to  0.000000
5/22/2010	8:48:09 PM	H2 MFC set to  0.000000
5/22/2010	8:48:09 PM	BCl3 MFC set to  0.000000
5/22/2010	8:48:09 PM	SiCl4 MFC set to  0.000000
5/22/2010	8:48:09 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	8:48:09 PM	Tube furnace set to 0
5/22/2010	8:48:53 PM	Helium valve closed
5/22/2010	8:48:53 PM	H2 valve closed
5/22/2010	8:48:53 PM	BCl3 valve closed
5/22/2010	8:48:53 PM	PH3 valve closed
5/22/2010	8:48:54 PM	SiCl4 pre valve closed
5/22/2010	8:48:54 PM	SiCl4 post valve closed
5/22/2010	8:48:54 PM	Bubbler valve closed
5/22/2010	8:48:54 PM	Main Vac valve opened
5/22/2010	8:48:54 PM	Bypass valve opened
5/22/2010	8:48:54 PM	Helium MFC set to  0.000000
5/22/2010	8:48:54 PM	H2 MFC set to  0.000000
5/22/2010	8:48:54 PM	BCl3 MFC set to  0.000000
5/22/2010	8:48:54 PM	SiCl4 MFC set to  0.000000
5/22/2010	8:48:54 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	8:48:54 PM	Tube furnace set to 0
5/22/2010	8:48:54 PM	Run finished at 8:48 PM
5/22/2010	8:48:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	8:49:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	8:49:18 PM	Recipe started at 8:49 PM
5/22/2010	8:49:18 PM	H2 valve closed
5/22/2010	8:49:18 PM	BCl3 valve closed
5/22/2010	8:49:18 PM	PH3 valve closed
5/22/2010	8:49:18 PM	SiCl4 pre valve closed
5/22/2010	8:49:18 PM	SiCl4 post valve closed
5/22/2010	8:49:18 PM	Main Vac valve closed
5/22/2010	8:49:18 PM	Bypass valve closed
5/22/2010	8:49:18 PM	Bubbler valve closed
5/22/2010	8:49:18 PM	Helium valve opened
5/22/2010	8:49:18 PM	Helium MFC set to  500.000000
5/22/2010	8:49:18 PM	H2 MFC set to  0.000000
5/22/2010	8:49:18 PM	BCl3 MFC set to  0.000000
5/22/2010	8:49:18 PM	SiCl4 MFC set to  0.000000
5/22/2010	8:49:18 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	8:49:19 PM	Tube furnace set to 0
5/22/2010	8:50:38 PM	Helium valve closed
5/22/2010	8:50:38 PM	H2 valve closed
5/22/2010	8:50:38 PM	BCl3 valve closed
5/22/2010	8:50:38 PM	PH3 valve closed
5/22/2010	8:50:38 PM	SiCl4 pre valve closed
5/22/2010	8:50:38 PM	SiCl4 post valve closed
5/22/2010	8:50:38 PM	Main Vac valve closed
5/22/2010	8:50:38 PM	Bypass valve closed
5/22/2010	8:50:38 PM	Bubbler valve closed
5/22/2010	8:50:38 PM	Helium MFC set to  0.000000
5/22/2010	8:50:38 PM	H2 MFC set to  0.000000
5/22/2010	8:50:38 PM	BCl3 MFC set to  0.000000
5/22/2010	8:50:38 PM	SiCl4 MFC set to  0.000000
5/22/2010	8:50:38 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	8:50:38 PM	Tube furnace set to 0
5/22/2010	8:50:38 PM	Run finished at 8:50 PM
5/22/2010	8:50:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/22/2010	8:50:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	8:50:42 PM	Recipe started at 8:50 PM
5/22/2010	8:50:42 PM	Helium valve closed
5/22/2010	8:50:42 PM	H2 valve closed
5/22/2010	8:50:42 PM	BCl3 valve closed
5/22/2010	8:50:42 PM	PH3 valve closed
5/22/2010	8:50:42 PM	SiCl4 pre valve closed
5/22/2010	8:50:42 PM	SiCl4 post valve closed
5/22/2010	8:50:42 PM	Main Vac valve closed
5/22/2010	8:50:42 PM	Bubbler valve closed
5/22/2010	8:50:42 PM	Bypass valve opened
5/22/2010	8:50:42 PM	Helium MFC set to  0.000000
5/22/2010	8:50:42 PM	H2 MFC set to  0.000000
5/22/2010	8:50:42 PM	BCl3 MFC set to  0.000000
5/22/2010	8:50:42 PM	SiCl4 MFC set to  0.000000
5/22/2010	8:50:42 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	8:50:42 PM	Tube furnace set to 0
5/22/2010	8:51:14 PM	Helium valve closed
5/22/2010	8:51:14 PM	H2 valve closed
5/22/2010	8:51:14 PM	BCl3 valve closed
5/22/2010	8:51:14 PM	PH3 valve closed
5/22/2010	8:51:14 PM	SiCl4 pre valve closed
5/22/2010	8:51:14 PM	SiCl4 post valve closed
5/22/2010	8:51:14 PM	Bubbler valve closed
5/22/2010	8:51:14 PM	Main Vac valve opened
5/22/2010	8:51:14 PM	Bypass valve opened
5/22/2010	8:51:14 PM	Helium MFC set to  0.000000
5/22/2010	8:51:14 PM	H2 MFC set to  0.000000
5/22/2010	8:51:14 PM	BCl3 MFC set to  0.000000
5/22/2010	8:51:14 PM	SiCl4 MFC set to  0.000000
5/22/2010	8:51:14 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	8:51:14 PM	Tube furnace set to 0
5/22/2010	8:51:14 PM	Run finished at 8:51 PM
5/22/2010	8:51:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	8:58:19 PM	Helium MFC set to  100.000000
5/22/2010	8:58:19 PM	Helium valve opened
5/22/2010	9:00:30 PM	Helium valve closed
5/22/2010	9:02:29 PM	Recipe started at 9:02 PM
5/22/2010	9:02:29 PM	Helium valve closed
5/22/2010	9:02:29 PM	BCl3 valve closed
5/22/2010	9:02:29 PM	PH3 valve closed
5/22/2010	9:02:29 PM	SiCl4 pre valve closed
5/22/2010	9:02:29 PM	SiCl4 post valve closed
5/22/2010	9:02:29 PM	Main Vac valve closed
5/22/2010	9:02:29 PM	Bypass valve closed
5/22/2010	9:02:29 PM	Bubbler valve closed
5/22/2010	9:02:29 PM	H2 valve opened
5/22/2010	9:02:29 PM	Helium MFC set to  0.000000
5/22/2010	9:02:29 PM	H2 MFC set to  500.000000
5/22/2010	9:02:29 PM	BCl3 MFC set to  0.000000
5/22/2010	9:02:29 PM	SiCl4 MFC set to  0.000000
5/22/2010	9:02:29 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:02:29 PM	Tube furnace set to 0
5/22/2010	9:03:50 PM	Helium valve closed
5/22/2010	9:03:50 PM	BCl3 valve closed
5/22/2010	9:03:50 PM	PH3 valve closed
5/22/2010	9:03:50 PM	SiCl4 pre valve closed
5/22/2010	9:03:50 PM	SiCl4 post valve closed
5/22/2010	9:03:50 PM	Main Vac valve closed
5/22/2010	9:03:50 PM	Bypass valve closed
5/22/2010	9:03:50 PM	H2 valve opened
5/22/2010	9:03:50 PM	Bubbler valve opened
5/22/2010	9:03:50 PM	Helium MFC set to  0.000000
5/22/2010	9:03:50 PM	H2 MFC set to  500.000000
5/22/2010	9:03:50 PM	BCl3 MFC set to  0.000000
5/22/2010	9:03:50 PM	SiCl4 MFC set to  0.000000
5/22/2010	9:03:50 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:03:50 PM	Tube furnace set to 1000
5/22/2010	9:23:50 PM	Helium valve closed
5/22/2010	9:23:50 PM	PH3 valve closed
5/22/2010	9:23:50 PM	Main Vac valve closed
5/22/2010	9:23:50 PM	Bypass valve closed
5/22/2010	9:23:50 PM	H2 valve opened
5/22/2010	9:23:50 PM	BCl3 valve opened
5/22/2010	9:23:50 PM	SiCl4 pre valve opened
5/22/2010	9:23:50 PM	SiCl4 post valve opened
5/22/2010	9:23:50 PM	Bubbler valve opened
5/22/2010	9:23:50 PM	Helium MFC set to  0.000000
5/22/2010	9:23:50 PM	H2 MFC set to  500.000000
5/22/2010	9:23:50 PM	BCl3 MFC set to  0.000000
5/22/2010	9:23:50 PM	SiCl4 MFC set to  325.000000
5/22/2010	9:23:50 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:23:50 PM	Tube furnace set to 1000
5/22/2010	9:43:50 PM	H2 valve closed
5/22/2010	9:43:50 PM	BCl3 valve closed
5/22/2010	9:43:50 PM	PH3 valve closed
5/22/2010	9:43:50 PM	SiCl4 pre valve closed
5/22/2010	9:43:50 PM	SiCl4 post valve closed
5/22/2010	9:43:50 PM	Main Vac valve closed
5/22/2010	9:43:50 PM	Bypass valve closed
5/22/2010	9:43:50 PM	Helium valve opened
5/22/2010	9:43:50 PM	Bubbler valve opened
5/22/2010	9:43:50 PM	Helium MFC set to  500.000000
5/22/2010	9:43:50 PM	H2 MFC set to  0.000000
5/22/2010	9:43:50 PM	BCl3 MFC set to  0.000000
5/22/2010	9:43:50 PM	SiCl4 MFC set to  0.000000
5/22/2010	9:43:50 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	9:43:50 PM	Tube furnace set to 0
5/22/2010	10:03:50 PM	Helium valve closed
5/22/2010	10:03:50 PM	H2 valve closed
5/22/2010	10:03:50 PM	BCl3 valve closed
5/22/2010	10:03:50 PM	PH3 valve closed
5/22/2010	10:03:50 PM	SiCl4 pre valve closed
5/22/2010	10:03:50 PM	SiCl4 post valve closed
5/22/2010	10:03:50 PM	Main Vac valve closed
5/22/2010	10:03:50 PM	Bypass valve closed
5/22/2010	10:03:50 PM	Bubbler valve closed
5/22/2010	10:03:50 PM	Helium MFC set to  0.000000
5/22/2010	10:03:50 PM	H2 MFC set to  0.000000
5/22/2010	10:03:50 PM	BCl3 MFC set to  0.000000
5/22/2010	10:03:50 PM	SiCl4 MFC set to  0.000000
5/22/2010	10:03:50 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:03:51 PM	Tube furnace set to 0
5/22/2010	10:03:51 PM	Run finished at 10:03 PM
5/22/2010	10:09:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	10:09:11 PM	Recipe started at 10:09 PM
5/22/2010	10:09:11 PM	Helium valve closed
5/22/2010	10:09:11 PM	H2 valve closed
5/22/2010	10:09:11 PM	BCl3 valve closed
5/22/2010	10:09:11 PM	PH3 valve closed
5/22/2010	10:09:11 PM	SiCl4 pre valve closed
5/22/2010	10:09:11 PM	SiCl4 post valve closed
5/22/2010	10:09:11 PM	Main Vac valve closed
5/22/2010	10:09:11 PM	Bubbler valve closed
5/22/2010	10:09:11 PM	Bypass valve opened
5/22/2010	10:09:11 PM	Helium MFC set to  0.000000
5/22/2010	10:09:11 PM	H2 MFC set to  0.000000
5/22/2010	10:09:11 PM	BCl3 MFC set to  0.000000
5/22/2010	10:09:11 PM	SiCl4 MFC set to  0.000000
5/22/2010	10:09:11 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:09:12 PM	Tube furnace set to 0
5/22/2010	10:09:58 PM	Helium valve closed
5/22/2010	10:09:58 PM	H2 valve closed
5/22/2010	10:09:58 PM	BCl3 valve closed
5/22/2010	10:09:58 PM	PH3 valve closed
5/22/2010	10:09:58 PM	SiCl4 pre valve closed
5/22/2010	10:09:58 PM	SiCl4 post valve closed
5/22/2010	10:09:58 PM	Bubbler valve closed
5/22/2010	10:09:58 PM	Main Vac valve opened
5/22/2010	10:09:58 PM	Bypass valve opened
5/22/2010	10:09:58 PM	Helium MFC set to  0.000000
5/22/2010	10:09:58 PM	H2 MFC set to  0.000000
5/22/2010	10:09:58 PM	BCl3 MFC set to  0.000000
5/22/2010	10:09:58 PM	SiCl4 MFC set to  0.000000
5/22/2010	10:09:58 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:09:58 PM	Tube furnace set to 0
5/22/2010	10:09:58 PM	Run finished at 10:09 PM
5/22/2010	10:09:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/22/2010	10:10:44 PM	Helium MFC set to  100.000000
5/22/2010	10:10:44 PM	Helium valve opened
5/22/2010	10:15:37 PM	Helium valve closed
5/22/2010	10:15:42 PM	Helium MFC set to  0.000000
5/22/2010	10:58:13 PM	Bypass valve closed
5/22/2010	10:58:14 PM	Main Vac valve closed
5/22/2010	10:58:25 PM	Main Vac valve opened
5/22/2010	10:58:26 PM	Bypass valve opened
5/22/2010	10:58:48 PM	Recipe started at 10:58 PM
5/22/2010	10:58:48 PM	Helium valve closed
5/22/2010	10:58:48 PM	BCl3 valve closed
5/22/2010	10:58:48 PM	PH3 valve closed
5/22/2010	10:58:48 PM	SiCl4 pre valve closed
5/22/2010	10:58:48 PM	SiCl4 post valve closed
5/22/2010	10:58:48 PM	Main Vac valve closed
5/22/2010	10:58:48 PM	Bypass valve closed
5/22/2010	10:58:48 PM	Bubbler valve closed
5/22/2010	10:58:48 PM	H2 valve opened
5/22/2010	10:58:48 PM	Helium MFC set to  0.000000
5/22/2010	10:58:48 PM	H2 MFC set to  500.000000
5/22/2010	10:58:48 PM	BCl3 MFC set to  0.000000
5/22/2010	10:58:48 PM	SiCl4 MFC set to  0.000000
5/22/2010	10:58:48 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	10:58:48 PM	Tube furnace set to 0
5/22/2010	11:00:07 PM	Helium valve closed
5/22/2010	11:00:07 PM	BCl3 valve closed
5/22/2010	11:00:07 PM	PH3 valve closed
5/22/2010	11:00:07 PM	SiCl4 pre valve closed
5/22/2010	11:00:07 PM	SiCl4 post valve closed
5/22/2010	11:00:07 PM	Main Vac valve closed
5/22/2010	11:00:07 PM	Bypass valve closed
5/22/2010	11:00:07 PM	H2 valve opened
5/22/2010	11:00:07 PM	Bubbler valve opened
5/22/2010	11:00:07 PM	Helium MFC set to  0.000000
5/22/2010	11:00:07 PM	H2 MFC set to  500.000000
5/22/2010	11:00:07 PM	BCl3 MFC set to  0.000000
5/22/2010	11:00:07 PM	SiCl4 MFC set to  0.000000
5/22/2010	11:00:07 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:00:07 PM	Tube furnace set to 1000
5/22/2010	11:20:07 PM	Helium valve closed
5/22/2010	11:20:07 PM	PH3 valve closed
5/22/2010	11:20:07 PM	Main Vac valve closed
5/22/2010	11:20:07 PM	Bypass valve closed
5/22/2010	11:20:07 PM	H2 valve opened
5/22/2010	11:20:07 PM	BCl3 valve opened
5/22/2010	11:20:07 PM	SiCl4 pre valve opened
5/22/2010	11:20:07 PM	SiCl4 post valve opened
5/22/2010	11:20:07 PM	Bubbler valve opened
5/22/2010	11:20:07 PM	Helium MFC set to  0.000000
5/22/2010	11:20:07 PM	H2 MFC set to  500.000000
5/22/2010	11:20:07 PM	BCl3 MFC set to  0.000000
5/22/2010	11:20:07 PM	SiCl4 MFC set to  325.000000
5/22/2010	11:20:07 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:20:07 PM	Tube furnace set to 1000
5/22/2010	11:40:07 PM	H2 valve closed
5/22/2010	11:40:07 PM	BCl3 valve closed
5/22/2010	11:40:07 PM	PH3 valve closed
5/22/2010	11:40:07 PM	SiCl4 pre valve closed
5/22/2010	11:40:07 PM	SiCl4 post valve closed
5/22/2010	11:40:07 PM	Main Vac valve closed
5/22/2010	11:40:07 PM	Bypass valve closed
5/22/2010	11:40:07 PM	Helium valve opened
5/22/2010	11:40:07 PM	Bubbler valve opened
5/22/2010	11:40:07 PM	Helium MFC set to  500.000000
5/22/2010	11:40:07 PM	H2 MFC set to  0.000000
5/22/2010	11:40:07 PM	BCl3 MFC set to  0.000000
5/22/2010	11:40:07 PM	SiCl4 MFC set to  0.000000
5/22/2010	11:40:07 PM	Bypass solenoid MFC set to  0.000000
5/22/2010	11:40:07 PM	Tube furnace set to 0
